Prof. Dr.-Ing. Thomas Mussenbrock

Leiter des Lehrstuhls für Angewandte Elektrodynamik und Plasmatechnik

Adresse:
Ruhr-Uni­ver­si­tät Bo­chum
Fakultät für Elektrotechnik und Informationstechnik
Angewandte Elektrodynamik und Plasmatechnik
Uni­ver­si­täts­stra­ße 150
D-44801 Bo­chum

Raum:
ID 1/555

Te­le­fon:
(+49)(0)234 / 32 – 22488

E-Mail:
thomas.mussenbrock(at)rub.de

Lebenslauf

  • Diplom-Ingenieur FH, Fachhochschule Bielefeld (1995)
  • Diplom-Ingenieur, Ruhr-Universität Bochum (1999)
  • Doktor-Ingenieur, Ruhr-Universität Bochum (2004)
  • Habilitation, Ruhr-Universität Bochum (2009)
  • Universitätsprofessor (W3), Theoretische Elektrotechnik, Brandenburgische Technische Universität (2016-2020)
  • Universitätsprofessor (W3), Angewandte Elektrodynamik und Plasmatechnik, Ruhr-Universität Bochum (seit 2020)

Publikationsverzeichnisse

Forschungsinteressen

  • Niedertemperaturplasmen
  • Umwelttechnische Anwendungen von Plasmen
  • Materialprozessierung
  • Nanoelektronische und memristive Bauelemente
  • Transport auf Mikro- und Nanometerskala
  • Modellierung und Simulation
Thomas Mussenbrock-WEB-00117-sRGB

Veröffentlichungen

Gergs, T., Mussenbrock, T., & Trieschmann, J. (2022). Molecular dynamics study on the role of Ar ions in the sputter deposition of Al thin films. Journal of Applied Physics, 132(6), 063302. https://doi.org/10.1063/5.0098040 Cite
Yarragolla, S., Hemke, T., Trieschmann, J., Zahari, F., Kohlstedt, H., & Mussenbrock, T. (2022). Stochastic behavior of an interface-based memristive device. Journal of Applied Physics, 131(13), 134304. https://doi.org/10.1063/5.0084085 Cite
Klich, M., Löwer, J., Wilczek, S., Mussenbrock, T., & Brinkmann, R. P. (2022). Validation of the smooth step model by particle-in-cell/Monte Carlo collisions simulations. Plasma Sources Science and Technology, 31(4), 045014. https://doi.org/10.1088/1361-6595/ac5dd3 Cite
Hübner, G., Bischoff, L., Korolov, I., Donkó, Z., Leimkühler, M., Liu, Y., Böke, M., Schulz-von der Gathen, V., Mussenbrock, T., & Schulze, J. (2022). The effects of the driving frequencies on micro atmospheric pressure He/N 2 plasma jets driven by tailored voltage waveforms. Journal of Physics D: Applied Physics, 55(9), 095204. https://doi.org/10.1088/1361-6463/ac3791 Cite
Nguyen-Smith, R. T., Böddecker, A., Schücke, L., Bibinov, N., Korolov, I., Zhang, Q.-Z., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2022). μs and ns twin surface dielectric barrier discharges operated in air: from electrode erosion to plasma characteristics. Plasma Sources Science and Technology, 31(3), 035008. https://doi.org/10.1088/1361-6595/ac5452 Cite
Gergs, T., Monti, C., Gaiser, S., Amberg, M., Schütz, U., Mussenbrock, T., Trieschmann, J., Heuberger, M., & Hegemann, D. (2022). Nanoporous SiOx plasma polymer films as carrier for liquid‐infused surfaces. Plasma Processes and Polymers, 19(8), 2200049. https://doi.org/10.1002/ppap.202200049 Cite
Gergs, T., Schmidt, F., Mussenbrock, T., & Trieschmann, J. (2021). Generalized Method for Charge-Transfer Equilibration in Reactive Molecular Dynamics. Journal of Chemical Theory and Computation, 17(11), 6691–6704. https://doi.org/10.1021/acs.jctc.1c00382 Cite
Korolov, I., Donkó, Z., Hübner, G., Liu, Y., Mussenbrock, T., & Schulze, J. (2021). Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N 2 mixtures. Plasma Sources Science and Technology, 30(9), 095013. https://doi.org/10.1088/1361-6595/ac1c4d Cite
Zhang, Q.-Z., Nguyen-Smith, R. T., Beckfeld, F., Liu, Y., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2021). Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations. Plasma Sources Science and Technology, 30(7), 075017. https://doi.org/10.1088/1361-6595/abf598 Cite
Liu, Y., Korolov, I., Trieschmann, J., Steuer, D., Schulz-von der Gathen, V., Böke, M., Bischoff, L., Hübner, G., Schulze, J., & Mussenbrock, T. (2021). Micro atmospheric pressure plasma jets excited in He/O 2 by voltage waveform tailoring: a study based on a numerical hybrid model and experiments. Plasma Sources Science and Technology, 30(6), 064001. https://doi.org/10.1088/1361-6595/abd0e0 Cite
Klich, M., Wilczek, S., Janssen, J. F. J., Brinkmann, R. P., Mussenbrock, T., & Trieschmann, J. (2021). Ion dynamics in capacitively coupled argon–xenon discharges. Plasma Sources Science and Technology, 30(6), 065019. https://doi.org/10.1088/1361-6595/ac02b0 Cite
Liu, Y., Korolov, I., Hemke, T., Bischoff, L., Hübner, G., Schulze, J., & Mussenbrock, T. (2021). Electron heating mode transitions in radio-frequency driven micro atmospheric pressure plasma jets in He/O 2 : A fluid dynamics approach. Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/abf370 Cite
Korolov, I., Steuer, D., Bischoff, L., Hübner, G., Liu, Y., Schulz-von der Gathen, V., Böke, M., Mussenbrock, T., & Schulze, J. (2021). Atomic oxygen generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and O 2. Journal of Physics D: Applied Physics, 54(12), 125203. https://doi.org/10.1088/1361-6463/abd20e Cite
Oberrath, J., Friedrichs, M., Gong, J., Oberberg, M., Pohle, D., Schulz, C., Wang, C., Awakowicz, P., Brinkmann, R. P., Lapke, M., Mussenbrock, T., Musch, T., & Rolfes, I. (2021). On the Multipole Resonance Probe: Current Status of Research and Development. IEEE Transactions on Plasma Science, 49(11), 3293–3298. https://doi.org/10.1109/TPS.2021.3113832 Cite
Trieschmann, J., Larsen, A. W., Mussenbrock, T., & Korsholm, S. B. (2021). Kinetic simulation of electron cyclotron resonance assisted gas breakdown in split-biased waveguides for ITER collective Thomson scattering diagnostic. Physics of Plasmas, 28(8), 082505. https://doi.org/10.1063/5.0055461 Cite
Liu, Y., Trieschmann, J., Berger, B., Schulze, J., & Mussenbrock, T. (2021). Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field. Physics of Plasmas, 28(5), 053505. https://doi.org/10.1063/5.0045947 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Plasma Sources Science and Technology, 54, 075014. https://doi.org/10.1088/1361-6595/ab9374 Cite
Wilczek, S., Schulze, J., Brinkmann, R. P., Donkó, Z., Trieschmann, J., & Mussenbrock, T. (2020). Electron dynamics in low pressure capacitively coupled radio frequency discharges. Journal of Applied Physics, 127(18), 181101. https://doi.org/10.1063/5.0003114 Cite
Korolov, I., Leimkühler, M., Böke, M., Donkó, Z., Schulz-von der Gathen, V., Bischoff, L., Hübner, G., Hartmann, P., Gans, T., Liu, Y., Mussenbrock, T., & Schulze, J. (2020). Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N 2. Journal of Physics D: Applied Physics, 53(18), 185201. https://doi.org/10.1088/1361-6463/ab6d97 Cite
Larsen, A. W., Korsholm, S. B., Gonçalves, B., Gutierrez, H. E., Henriques, E., Infante, V., Jensen, T., Jessen, M., Klinkby, E. B., NonbØl, E., Luis, R., Vale, A., Lopes, A., Naulin, V., Nielsen, S. K., Salewski, M., Rasmussen, J., Taormina, A., MØllsØe, C., … Trieschmann, J. (2019). Mitigation of EC breakdown in the gyrotron transmission line of the ITER Collective Thomson Scattering diagnostic via a Split Biased Waveguide. Journal of Instrumentation, 14(11), C11009–C11009. https://doi.org/10.1088/1748-0221/14/11/C11009 Cite
Korolov, I., Donkó, Z., Hübner, G., Bischoff, L., Hartmann, P., Gans, T., Liu, Y., Mussenbrock, T., & Schulze, J. (2019). Control of electron dynamics, radical and metastable species generation in atmospheric pressure RF plasma jets by Voltage Waveform Tailoring. Plasma Sources Science and Technology, 28(9), 094001. https://doi.org/10.1088/1361-6595/ab38ea Cite
Krüger, F., Wilczek, S., Mussenbrock, T., & Schulze, J. (2019). Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches. Plasma Sources Science and Technology, 28(7), 075017. https://doi.org/10.1088/1361-6595/ab2c72 Cite
Schmidt, F., Trieschmann, J., Gergs, T., & Mussenbrock, T. (2019). A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits. Journal of Applied Physics, 125(17), 173106. https://doi.org/10.1063/1.5091965 Cite
Schmidt, F., Schulze, J., Johnson, E., Booth, J.-P., Keil, D., French, D. M., Trieschmann, J., & Mussenbrock, T. (2019). Erratum: Multi frequency matching for voltage waveform tailoring (2018 Plasma Sources Sci. Technol . 27 095012). Plasma Sources Science and Technology, 28(1), 019601. https://doi.org/10.1088/1361-6595/aaeb4b Cite
Gibson, A. R., Donkó, Z., Alelyani, L., Bischoff, L., Hübner, G., Bredin, J., Doyle, S., Korolov, I., Niemi, K., Mussenbrock, T., Hartmann, P., Dedrick, J. P., Schulze, J., Gans, T., & O’Connell, D. (2019). Disrupting the spatio-temporal symmetry of the electron dynamics in atmospheric pressure plasmas by voltage waveform tailoring. Plasma Sources Science and Technology, 28(1), 01LT01. https://doi.org/10.1088/1361-6595/aaf535 Cite
Zahari, F., Schlichting, F., Strobel, J., Dirkmann, S., Cipo, J., Gauter, S., Trieschmann, J., Marquardt, R., Haberfehlner, G., Kothleitner, G., Kienle, L., Mussenbrock, T., Ziegler, M., Kersten, H., & Kohlstedt, H. (2019). Correlation between sputter deposition parameters and I-V characteristics in double-barrier memristive devices. Journal of Vacuum Science & Technology B, 37(6), 061203. https://doi.org/10.1116/1.5119984 Cite
Kirchheim, D., Wilski, S., Jaritz, M., Mitschker, F., Oberberg, M., Trieschmann, J., Banko, L., Brochhagen, M., Schreckenberg, R., Hopmann, C., Böke, M., Benedikt, J., de los Arcos, T., Grundmeier, G., Grochla, D., Ludwig, A., Mussenbrock, T., Brinkmann, R. P., Awakowicz, P., & Dahlmann, R. (2019). Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD. Journal of Coatings Technology and Research, 16(2), 573–583. https://doi.org/10.1007/s11998-018-0138-4 Cite
Wilczek, S., Trieschmann, J., Schulze, J., Donkó, Z., Brinkmann, R. P., & Mussenbrock, T. (2018). Disparity between current and voltage driven capacitively coupled radio frequency discharges. Plasma Sources Science and Technology, 27(12), 125010. https://doi.org/10.1088/1361-6595/aae5c1 Cite
Bischoff, L., Hübner, G., Korolov, I., Donkó, Z., Hartmann, P., Gans, T., Held, J., Schulz-von der Gathen, V., Liu, Y., Mussenbrock, T., & Schulze, J. (2018). Experimental and computational investigations of electron dynamics in micro atmospheric pressure radio-frequency plasma jets operated in He/N 2 mixtures. Plasma Sources Science and Technology, 27(12), 125009. https://doi.org/10.1088/1361-6595/aaf35d Cite
Berger, B., You, K., Lee, H.-C., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2018). Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas. Plasma Sources Science and Technology, 27(12), 12LT02. https://doi.org/10.1088/1361-6595/aaefc7 Cite
Trieschmann, J., & Mussenbrock, T. (2018). Kinetic bandgap analysis of plasma photonic crystals. Journal of Applied Physics, 124(17), 173302. https://doi.org/10.1063/1.5055282 Cite
Schmidt, F., Mussenbrock, T., & Trieschmann, J. (2018). Consistent simulation of capacitive radio-frequency discharges and external matching networks. Plasma Sources Science and Technology, 27(10), 105017. https://doi.org/10.1088/1361-6595/aae429 Cite
Schmidt, F., Schulze, J., Johnson, E., Booth, J.-P., Keil, D., French, D. M., Trieschmann, J., & Mussenbrock, T. (2018). Multi frequency matching for voltage waveform tailoring. Plasma Sources Science and Technology, 27(9), 095012. https://doi.org/10.1088/1361-6595/aad2cd Cite
Gergs, T., Dirkmann, S., & Mussenbrock, T. (2018). Integration of external electric fields in molecular dynamics simulation models for resistive switching devices. Journal of Applied Physics, 123(24), 245301. https://doi.org/10.1063/1.5029877 Cite
Trieschmann, J., Ries, S., Bibinov, N., Awakowicz, P., Mráz, S., Schneider, J. M., & Mussenbrock, T. (2018). Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N 2 plasma. Plasma Sources Science and Technology, 27(5), 054003. https://doi.org/10.1088/1361-6595/aac23e Cite
Dirkmann, S., Kaiser, J., Wenger, C., & Mussenbrock, T. (2018). Filament Growth and Resistive Switching in Hafnium Oxide Memristive Devices. ACS Applied Materials & Interfaces, 10(17), 14857–14868. https://doi.org/10.1021/acsami.7b19836 Cite
Berger, B., Steinberger, T., Schüngel, E., Koepke, M., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2017). Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase. Applied Physics Letters, 111(20), 201601. https://doi.org/10.1063/1.5000144 Cite
Daksha, M., Derzsi, A., Wilczek, S., Trieschmann, J., Mussenbrock, T., Awakowicz, P., Donkó, Z., & Schulze, J. (2017). The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas. Plasma Sources Science and Technology, 26(8), 085006. https://doi.org/10.1088/1361-6595/aa7c88 Cite
Strobel, J., Hansen, M., Dirkmann, S., Neelisetty, K. K., Ziegler, M., Haberfehlner, G., Popescu, R., Kothleitner, G., Chakravadhanula, V. S. K., Kübel, C., Kohlstedt, H., Mussenbrock, T., & Kienle, L. (2017). In depth nano spectroscopic analysis on homogeneously switching double barrier memristive devices. Journal of Applied Physics, 121(24), 245307. https://doi.org/10.1063/1.4990145 Cite
Solan, E., Dirkmann, S., Hansen, M., Schröder, D., Kohlstedt, H., Ziegler, M., Mussenbrock, T., & Ochs, K. (2017). An enhanced lumped element electrical model of a double barrier memristive device. Journal of Physics D: Applied Physics, 50(19), 195102. https://doi.org/10.1088/1361-6463/aa69ae Cite
Trieschmann, J., & Mussenbrock, T. (2017). Kinetic analysis of negative power deposition in inductive low pressure plasmas. Plasma Sources Science and Technology, 26(2), 024004. https://doi.org/10.1088/1361-6595/aa51f2 Cite
Shihab, M., & Mussenbrock, T. (2017). Kinetic investigation of the ion angular distribution in capacitive radio-frequency plasmas. Physics of Plasmas, 24(11), 113510. https://doi.org/10.1063/1.4994754 Cite
Dirkmann, S., & Mussenbrock, T. (2017). Resistive switching in memristive electrochemical metallization devices. AIP Advances, 7(6), 065006. https://doi.org/10.1063/1.4985443 Cite
Eremin, D., Brinkmann, R. P., & Mussenbrock, T. (2017). Observations of Surface Mode Influence on Plasma Uniformity in PIC/MCC Simulations of Large Capacitive Discharges: Observations of Surface Mode Influence on Plasma…. Plasma Processes and Polymers, 14(4–5), 1600164. https://doi.org/10.1002/ppap.201600164 Cite
Trieschmann, J., Schmidt, F., & Mussenbrock, T. (2017). Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges: Particle-in-Cell/Test-Particle Simulations of Technological…. Plasma Processes and Polymers, 14(1–2), 1600140. https://doi.org/10.1002/ppap.201600140 Cite
Eremin, D., Bienholz, S., Szeremley, D., Trieschmann, J., Ries, S., Awakowicz, P., Mussenbrock, T., & Brinkmann, R. P. (2016). On the physics of a large CCP discharge. Plasma Sources Science and Technology, 25(2), 025020. https://doi.org/10.1088/0963-0252/25/2/025020 Cite
Schulze, J., & Mussenbrock, T. (2016). Electron heating in technological plasmas. Plasma Sources Science and Technology, 25(2), 020401. https://doi.org/10.1088/0963-0252/25/2/020401 Cite
Kemaneci, E., Booth, J.-P., Chabert, P., van Dijk, J., Mussenbrock, T., & Brinkmann, R. P. (2016). A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma. Plasma Sources Science and Technology, 25(2), 025025. https://doi.org/10.1088/0963-0252/25/2/025025 Cite
Eremin, D., Hemke, T., & Mussenbrock, T. (2016). A new hybrid scheme for simulations of highly collisional RF-driven plasmas. Plasma Sources Science and Technology, 25(1), 015009. https://doi.org/10.1088/0963-0252/25/1/015009 Cite

© 2022

de_DE
en_GB de_DE