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Hier finden Sie ausschließlich begutachtete Zeitschriftenartikeln. Informationen zu Konferenz- und Workshopbeiträgen erhalten Sie bei den jeweiligen Autoren.

Ohtsu, Y., Hara, K., Imoto, S., Schulze, J., Yasunaga, T., & Ikegami, Y. (2023). Spatial structures of rf ring-shaped magnetized sputtering plasmas with two facing cylindrical ZnO/Al ₂ O ₃ targets. Japanese Journal of Applied Physics, 62(SI), SI1007. https://doi.org/10.35848/1347-4065/acc7aa Cite

Bracht, V., Gembus, J.-L., Bibinov, N., & Awakowicz, P. (2023). Surface modifications of aluminium and aluminium oxide induced by a treatment with a He-plasma jet and plasma electrolytic oxidation. Journal of Physics D: Applied Physics, 56(16), 165201. https://doi.org/10.1088/1361-6463/acbd5e Cite

Eremin, D., Kemaneci, E., Matsukuma, M., Mussenbrock, T., & Brinkmann, R. P. (2023). Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code. Plasma Sources Science and Technology, 32(4), 044007. https://doi.org/10.1088/1361-6595/accecb Cite

Eremin, D., Engel, D., Krüger, D., Wilczek, S., Berger, B., Oberberg, M., Wölfel, C., Smolyakov, A., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P. (2023). Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode. Plasma Sources Science and Technology, 32(4), 045007. https://doi.org/10.1088/1361-6595/acc481 Cite

Eremin, D., Berger, B., Engel, D., Kallähn, J., Köhn, K., Krüger, D., Xu, L., Oberberg, M., Wölfel, C., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P. (2023). Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code. Plasma Sources Science and Technology, 32(4), 045008. https://doi.org/10.1088/1361-6595/acc47f Cite

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2023). Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges. Plasma Sources Science and Technology, 32(4), 045002. https://doi.org/10.1088/1361-6595/acc6e9 Cite

Berger, B., Eremin, D., Oberberg, M., Engel, D., Wölfel, C., Zhang, Q.-Z., Awakowicz, P., Lunze, J., Brinkmann, R. P., & Schulze, J. (2023). Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results. Plasma Sources Science and Technology, 32(4), 045009. https://doi.org/10.1088/1361-6595/acc480 Cite

Rauf, S., Schroeder, M., Korolov, I., Kenney, J., & Schulze, J. (2023). Plasma dynamics in a capacitively coupled discharge driven by a combination of a single high frequency and a tailored low frequency rectangular voltage waveform. Plasma Sources Science and Technology, 32(3), 034002. https://doi.org/10.1088/1361-6595/acc12d Cite

Gergs, T., Mussenbrock, T., & Trieschmann, J. (2023). Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges. Journal of Physics D: Applied Physics, 56(8), 084003. https://doi.org/10.1088/1361-6463/acb6a4 Cite

Hartmann, P., Korolov, I., Escandón-López, J., van Gennip, W., Buskes, K., & Schulze, J. (2023). Control of ion flux-energy distribution at dielectric wafer surfaces by low frequency tailored voltage waveforms in capacitively coupled plasmas. Journal of Physics D: Applied Physics, 56(5), 055202. https://doi.org/10.1088/1361-6463/acacaa Cite

Liu, Y., Vass, M., Hübner, G., Schulenberg, D., Hemke, T., Bischoff, L., Chur, S., Steuer, D., Golda, J., Böke, M., Schulze, J., Korolov, I., & Mussenbrock, T. (2023). Local enhancement of electron heating and neutral species generation in radio-frequency micro-atmospheric pressure plasma jets: the effects of structured electrode topologies. Plasma Sources Science and Technology, 32(2), 025012. https://doi.org/10.1088/1361-6595/acb9b8 Cite

Davies, H. L., Guerra, V., van der Woude, M., Gans, T., O’Connell, D., & Gibson, A. R. (2023). Vibrational kinetics in repetitively pulsed atmospheric pressure nitrogen discharges: average-power-dependent switching behaviour. Plasma Sources Science and Technology, 32(1), 014003. https://doi.org/10.1088/1361-6595/aca9f4 Cite

Gergs, T., Mussenbrock, T., & Trieschmann, J. (2023). Charge-optimized many-body interaction potential for AlN revisited to explore plasma–surface interactions. Scientific Reports, 13, 5287. https://doi.org/https://doi.org/10.1038/s41598-023-31862-8 Cite

Mujahid, Z.-I., Korolov, I., Liu, Y., Mussenbrock, T., & Schulze, J. (2022). Propagation dynamics and interaction of multiple streamers at and above adjacent dielectric pellets in a packed bed plasma reactor. Journal of Physics D: Applied Physics, 55(49), 495201. https://doi.org/10.1088/1361-6463/ac99ea Cite

Yarragolla, S., Du, N., Hemke, T., Zhao, X., Chen, Z., Polian, I., & Mussenbrock, T. (2022). Physics inspired compact modelling of $$\hbox {BiFeO}_3$$ based memristors. Scientific Reports, 12(1), 20490. https://doi.org/10.1038/s41598-022-24439-4 Cite

Vass, M., Wang, L., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2022). Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis. Plasma Sources Science and Technology, 31(11), 115004. https://doi.org/10.1088/1361-6595/ac9754 Cite

Steuer, D., van Impel, H., Gibson, A. R., Schulz-von der Gathen, V., Böke, M., & Golda, J. (2022). State enhanced actinometry in the COST microplasma jet. Plasma Sources Science and Technology, 31(10), 10LT01. https://doi.org/10.1088/1361-6595/ac90e8 Cite

Wang, L., Vass, M., Lafleur, T., Donkó, Z., Song, Y.-H., & Schulze, J. (2022). On the validity of the classical plasma conductivity in capacitive RF discharges. Plasma Sources Science and Technology, 31(10), 105013. https://doi.org/10.1088/1361-6595/ac95c1 Cite

Tennyson, J., Mohr, S., Hanicinec, M., Dzarasova, A., Smith, C., Waddington, S., Liu, B., Alves, L. L., Bartschat, K., Bogaerts, A., Engelmann, S. U., Gans, T., Gibson, A. R., Hamaguchi, S., Hamilton, K. R., Hill, C., O’Connell, D., Rauf, S., van ’t Veer, K., & Zatsarinny, O. (2022). The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions. Plasma Sources Science and Technology, 31(9), 095020. https://doi.org/10.1088/1361-6595/ac907e Cite

Ďurian, J., Hartmann, P., Matejčík, Š., Gibson, A. R., & Donkó, Z. (2022). Experimental and simulation study of a capacitively coupled radiofrequency plasma with a structured electrode. Plasma Sources Science and Technology, 31(9), 095001. https://doi.org/10.1088/1361-6595/ac8449 Cite

Gergs, T., Mussenbrock, T., & Trieschmann, J. (2022). Molecular dynamics study on the role of Ar ions in the sputter deposition of Al thin films. Journal of Applied Physics, 132(6), 063302. https://doi.org/10.1063/5.0098040 Cite

Sun, J.-Y., Wen, H., Zhang, Q.-Z., Schulze, J., Liu, Y.-X., & Wang, Y.-N. (2022). Electron heating mode transition induced by the magnetic confinement of secondary electrons in capacitively coupled radio frequency discharges. Plasma Sources Science and Technology, 31(8), 085012. https://doi.org/10.1088/1361-6595/ac882d Cite

Fu, Y.-Y., Wang, X.-K., Liu, Y.-X., Schulze, J., Donkó, Z., & Wang, Y.-N. (2022). Effects of ‘step-like’ amplitude-modulation on a pulsed capacitively coupled RF discharge: an experimental investigation. Plasma Sources Science and Technology, 31(8), 085005. https://doi.org/10.1088/1361-6595/ac81e9 Cite

Ohtsu, Y., Sakata, G., Schulze, J., Yasunaga, T., & Ikegami, Y. (2022). Spatial profile of Al-ZnO thin film on polycarbonate deposited by ring-shaped magnetized rf plasma sputtering with two facing cylindrical Al ₂ O ₃ – ZnO targets. Japanese Journal of Applied Physics, 61(SI), SI1005. https://doi.org/10.35848/1347-4065/ac4a01 Cite

Roggendorf, J., Berger, B., Eremin, D., Oberberg, M., Engel, D., Wölfel, C., Zhang, Q.-Z., Awakowicz, P., Lunze, J., & Schulze, J. (2022). Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes. Plasma Sources Science and Technology, 31(6), 065007. https://doi.org/10.1088/1361-6595/ac7413 Cite

Wang, X.-K., Wang, X.-Y., Liu, Y.-X., Schulze, J., Donkó, Z., & Wang, Y.-N. (2022). Striations in dual-low-frequency (2/10 MHz) driven capacitively coupled CF ₄ plasmas. Plasma Sources Science and Technology, 31(6), 064002. https://doi.org/10.1088/1361-6595/ac6692 Cite

Wang, L., Vass, M., Donkó, Z., Hartmann, P., Derzsi, A., Song, Y.-H., & Schulze, J. (2022). Electropositive core in electronegative magnetized capacitive radio frequency plasmas. Plasma Sources Science and Technology, 31(6), 06LT01. https://doi.org/10.1088/1361-6595/ac5ec7 Cite

Vass, M., Palla, P., & Hartmann, P. (2022). Revisiting the numerical stability/accuracy conditions of explicit PIC/MCC simulations of low-temperature gas discharges. Plasma Sources Science and Technology, 31(6), 064001. https://doi.org/10.1088/1361-6595/ac6e85 Cite

Schücke, L., Bodnar, A., Friedrichs, N., Böddecker, A., Peters, N., Ollegott, K., Oberste-Beulmann, C., Wirth, P., Nguyen-Smith, R. T., Korolov, I., Gibson, A. R., Muhler, M., & Awakowicz, P. (2022). Optical absorption spectroscopy of reactive oxygen and nitrogen species in a surface dielectric barrier discharge. Journal of Physics D: Applied Physics, 55(21), 215205. https://doi.org/10.1088/1361-6463/ac5661 Cite

Hartmann, P., Korolov, I., Escandón-López, J., van Gennip, W., Buskes, K., & Schulze, J. (2022). Control of ion flux-energy distributions by low frequency square-shaped tailored voltage waveforms in capacitively coupled plasmas. Plasma Sources Science and Technology, 31(5), 055017. https://doi.org/10.1088/1361-6595/ac6e05 Cite

Li, T., Yan, H.-J., Li, J.-Q., Schulze, J., Yu, S.-Q., Song, J., & Zhang, Q.-Z. (2022). The role of surface charge and its decay in surface dielectric barrier discharges. Plasma Sources Science and Technology, 31(5), 055016. https://doi.org/10.1088/1361-6595/ac676e Cite

Yarragolla, S., Hemke, T., Trieschmann, J., Zahari, F., Kohlstedt, H., & Mussenbrock, T. (2022). Stochastic behavior of an interface-based memristive device. Journal of Applied Physics, 131(13), 134304. https://doi.org/10.1063/5.0084085 Cite

Sun, J.-Y., Zhang, Q.-Z., Schulze, J., & Wang, Y.-N. (2022). Collisionless magnetized sheath resonance heating induced by a transverse magnetic field in low-pressure capacitive rf discharges. Plasma Sources Science and Technology, 31(4), 045011. https://doi.org/10.1088/1361-6595/ac5ecb Cite

Klich, M., Löwer, J., Wilczek, S., Mussenbrock, T., & Brinkmann, R. P. (2022). Validation of the smooth step model by particle-in-cell/Monte Carlo collisions simulations. Plasma Sources Science and Technology, 31(4), 045014. https://doi.org/10.1088/1361-6595/ac5dd3 Cite

Vass, M., Wilczek, S., Derzsi, A., Horváth, B., Hartmann, P., & Donkó, Z. (2022). Evolution of the bulk electric field in capacitively coupled argon plasmas at intermediate pressures. Plasma Sources Science and Technology, 31(4), 045017. https://doi.org/10.1088/1361-6595/ac6361 Cite

Horváth, B., Donkó, Z., Schulze, J., & Derzsi, A. (2022). The critical role of electron induced secondary electrons in high-voltage and low-pressure capacitively coupled oxygen plasmas. Plasma Sources Science and Technology, 31(4), 045025. https://doi.org/10.1088/1361-6595/ac64bd Cite

Hübner, G., Bischoff, L., Korolov, I., Donkó, Z., Leimkühler, M., Liu, Y., Böke, M., Schulz-von der Gathen, V., Mussenbrock, T., & Schulze, J. (2022). The effects of the driving frequencies on micro atmospheric pressure He/N ₂ plasma jets driven by tailored voltage waveforms. Journal of Physics D: Applied Physics, 55(9), 095204. https://doi.org/10.1088/1361-6463/ac3791 Cite

Nguyen-Smith, R. T., Böddecker, A., Schücke, L., Bibinov, N., Korolov, I., Zhang, Q.-Z., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2022). μs and ns twin surface dielectric barrier discharges operated in air: from electrode erosion to plasma characteristics. Plasma Sources Science and Technology, 31(3), 035008. https://doi.org/10.1088/1361-6595/ac5452 Cite

Dong, W., Zhang, Y.-F., Dai, Z.-L., Schulze, J., Song, Y.-H., & Wang, Y.-N. (2022). Hybrid simulation of instabilities in capacitively coupled RF CF ₄ /Ar plasmas. Plasma Sources Science and Technology, 31(2), 025006. https://doi.org/10.1088/1361-6595/ac47e4 Cite

Mujahid, Z.-I., & Oteef, M. D. Y. (2022). Method and apparatus for generating plasma using a patterned dielectric or electrode (Patent No. US 11 266 003 B2). Cite

Zaka-ul-Islam, M., & Schulze, J. (2022). Wave-like emission propagation and fine structures at the contact points of adjacent dielectric pellets in packed bed plasma reactors (PBPRs) operated in helium. AIP Advances, 12(1), 015128. https://doi.org/10.1063/5.0054208 Cite

Fuchs, F., Bibinov, N., Blanco, E. V., Pfaender, S., Theiß, S., Wolter, H., & Awakowicz, P. (2022). Characterization of a robot-assisted UV-C disinfection for the inactivation of surface-associated microorganisms and viruses. Journal of Photochemistry and Photobiology, 11, 100123. https://doi.org/10.1016/j.jpap.2022.100123 Cite

Ohtsu, Y., Yasuda, K., & Schulze, J. (2022). Temporal evolution of the ion flux to the target in rotational RF multimagnetron plasma. Journal of Vacuum Science & Technology A, 40(5), 053006. https://doi.org/10.1116/6.0001994 Cite

Frohnert, S., & Mentel, J. (2022). Investigation of the interaction of dense noble gas plasmas with cold cathodes: II Arc spot ignition on Au, Pd and Pt cathodes. Contributions to Plasma Physics, 62(7). https://doi.org/10.1002/ctpp.202100214 Cite

Frohnert, S., & Mentel, J. (2022). Investigation of the interaction of dense noble gas plasmas with cold cathodes: I—Experimental setup and application to Al, Cu, Ti, and graphite cathodes. Contributions to Plasma Physics, 62(7). https://doi.org/10.1002/ctpp.202100212 Cite

Frohnert, S., & Mentel, J. (2022). Investigation of the interaction of dense noble gas plasmas with cold cathodes: III —Arc spot ignition on pure and doped W cathodes. Contributions to Plasma Physics, 62(7). https://doi.org/10.1002/ctpp.202100216 Cite

Gergs, T., Monti, C., Gaiser, S., Amberg, M., Schütz, U., Mussenbrock, T., Trieschmann, J., Heuberger, M., & Hegemann, D. (2022). Nanoporous SiOx plasma polymer films as carrier for liquid‐infused surfaces. Plasma Processes and Polymers, 19(8), 2200049. https://doi.org/10.1002/ppap.202200049 Cite

Yasuda, K., Ohtsu, Y., & Schulze, J. (2022). Development of a cruciform radio-frequency closed magnetron sputtering source including four sectorial magnetron sputtering discharges for uniform target utilization. Vacuum, 202, 111184. https://doi.org/10.1016/j.vacuum.2022.111184 Cite

Gergs, T., Borislavov, B., & Trieschmann, J. (2022). Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks. Journal of Vacuum Science & Technology B, 40(1), 012802. https://doi.org/10.1116/6.0001485 Cite

Ohtsu, Y., Amzad Hossain, M., & Schulze, J. (2022). Characteristics of Novel Rotational Magnetron Sputtering Plasma Sources with Various Magnet Arrangements for Target Utilization Saving Resources. In Characteristics of Novel Rotational Magnetron Sputtering Plasma Sources with Various Magnet Arrangements for Target Utilization Saving Resources (Vol. 56). Nova Science Publishers. https://novapublishers.com/shop/advances-in-materials-science-research-volume-56/ Cite

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Publikationen

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