Publications

Jüngling, E., Wilczek, S., Mussenbrock, T., Böke, M., & Von Keudell, A. (2024). Plasma sheath tailoring by a magnetic field for three-dimensional plasma etching. Applied Physics Letters, 124(7), 074101. https://doi.org/10.1063/5.0187685 Cite
Derzsi, A., Vass, M., Masheyeva, R., Horváth, B., Donkó, Z., & Hartmann, P. (2024). Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas. Plasma Sources Science and Technology, 33(2), 025005. https://doi.org/10.1088/1361-6595/ad1fd5 Cite
Smith, G. J., Diomede, P., Gibson, A. R., Doyle, S. J., Guerra, V., Kushner, M. J., Gans, T., & Dedrick, J. P. (2024). Low-pressure inductively coupled plasmas in hydrogen: impact of gas heating on the spatial distribution of atomic hydrogen and vibrationally excited states. Plasma Sources Science and Technology, 33(2), 025002. https://doi.org/10.1088/1361-6595/ad1ece Cite
Schulenberg, D. A., Vass, M., Klich, M., Donkó, Z., Klotz, J., Bibinov, N., Mussenbrock, T., & Schulze, J. (2024). Mode Transition Induced by Gas Heating Along the Discharge Channel in Capacitively Coupled Atmospheric Pressure Micro Plasma Jets. Plasma Chemistry and Plasma Processing. https://doi.org/10.1007/s11090-023-10444-6 Cite
Vass, M., Schulenberg, D., Donkó, Z., Korolov, I., Hartmann, P., Schulze, J., & Mussenbrock, T. (2024). A new 2D fluid-MC hybrid approach for simulating nonequilibrium atmospheric pressure plasmas: density distribution of atomic oxygen in radio-frequency plasma jets in He/O 2 mixtures. Plasma Sources Science and Technology, 33(1), 015012. https://doi.org/10.1088/1361-6595/ad1f37 Cite
Zhou, Y., Zhao, K., Ma, F.-F., Liu, Y.-X., Gao, F., Schulze, J., & Wang, Y.-N. (2024). Low-frequency dependence of plasma characteristics in dual-frequency capacitively coupled plasma sources. Applied Physics Letters. Cite
Ziegler, M., Mussenbrock, T., & Kohlstedt, H. (Eds.). (2024). Bio-Inspired Information Pathways: From Neuroscience to Neurotronics (Vol. 16). Springer International Publishing. https://doi.org/10.1007/978-3-031-36705-2 Cite
Dirkmann, S., Trieschmann, J., & Mussenbrock, T. (2024). Modeling and Simulation of Silver-Based Filamentary Memristive Devices. In M. Ziegler, T. Mussenbrock, & H. Kohlstedt (Eds.), Bio-Inspired Information Pathways (Vol. 16, pp. 159–176). Springer International Publishing. https://doi.org/10.1007/978-3-031-36705-2_6 Cite
Trieschmann, J., Vialetto, L., & Gergs, T. (2023). Review: Machine learning for advancing low-temperature plasma modeling and simulation. Journal of Micro/Nanopatterning, Materials, and Metrology, 22(04). https://doi.org/10.1117/1.JMM.22.4.041504 Cite
Nawrath, N., Korolov, I., Bibinov, N., Awakowicz, P., & Gibson, A. R. (2023). Spatio-temporal dynamics of electrons and helium metastables in uniform dielectric barrier discharges formed in He/N 2. Plasma Sources Science and Technology, 32(12), 125014. https://doi.org/10.1088/1361-6595/ad1513 Cite
Sun, J.-Y., Schulze, J., Ma, F.-F., Zhang, Q.-Z., & Wang, Y.-N. (2023). Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges. Physics of Plasmas, 30(12), 120702. https://doi.org/10.1063/5.0175060 Cite
De Los Arcos, T., Awakowicz, P., Böke, M., Boysen, N., Brinkmann, R. P., Dahlmann, R., Devi, A., Eremin, D., Franke, J., Gergs, T., Jenderny, J., Kemaneci, E., Kühne, T. D., Kusmierz, S., Mussenbrock, T., Rubner, J., Trieschmann, J., Wessling, M., Xie, X., … Grundmeier, G. (2023). PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films. Plasma Processes and Polymers, e2300186. https://doi.org/10.1002/ppap.202300186 Cite
Park, C.-W., Horváth, B., Derzsi, A., Schulze, J., Kim, J. H., Donkó, Z., & Lee, H.-C. (2023). Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas. Plasma Sources Science and Technology, 32(11), 115003. https://doi.org/10.1088/1361-6595/ad0432 Cite
De Los Arcos, T., Awakowicz, P., Benedikt, J., Biskup, B., Böke, M., Boysen, N., Buschhaus, R., Dahlmann, R., Devi, A., Gergs, T., Jenderny, J., Von Keudell, A., Kühne, T. D., Kusmierz, S., Müller, H., Mussenbrock, T., Trieschmann, J., Zanders, D., Zysk, F., & Grundmeier, G. (2023). PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth. Plasma Processes and Polymers, e2300150. https://doi.org/10.1002/ppap.202300150 Cite
Böddecker, A., Passmann, M., Wilczek, S., Schücke, L., Korolov, I., Skoda, R., Mussenbrock, T., Gibson, A. R., & Awakowicz, P. (2023). Interactions Between Flow Fields Induced by Surface Dielectric Barrier Discharge Arrays. Plasma Chemistry and Plasma Processing. https://doi.org/10.1007/s11090-023-10406-y Cite
Neuroth, C., Mujahid, Z., Berger, B., Oberste-Beulmann, C., Oppotsch, T., Zhang, Q.-Z., Muhler, M., Mussenbrock, T., Korolov, I., & Schulze, J. (2023). The effects of catalyst conductivity and loading of dielectric surface structures on plasma dynamics in patterned dielectric barrier discharges. Plasma Sources Science and Technology, 32(10), 105019. https://doi.org/10.1088/1361-6595/ad0323 Cite
Ohtsu, Y., Hiwatashi, H., & Schulze, J. (2023). Spatial distributions of the ion flux in a capacitive hydrogen RF discharge using a hollow cathode with double toroidal grooves enclosed by magnets. Japanese Journal of Applied Physics, 62(SL), SL1017. https://doi.org/10.35848/1347-4065/acdb7f Cite
Wang, Y., Yan, H., Bai, X., Li, T., Schulze, J., Wang, X., Song, J., & Zhang, Q. (2023). Effect of airflow on the discharge uniformity at different cycles in the repetitive unipolar nanosecond‐pulsed dielectric barrier discharge. Plasma Processes and Polymers, e2300076. https://doi.org/10.1002/ppap.202300076 Cite
Wang, X.-K., Masheyeva, R., Liu, Y.-X., Hartmann, P., Schulze, J., & Donkó, Z. (2023). The electrical asymmetry effect in electronegative CF 4 capacitive RF plasmas operated in the striation mode. Plasma Sources Science and Technology, 32(8), 085009. https://doi.org/10.1088/1361-6595/acec96 Cite
Nösges, K., Klich, M., Derzsi, A., Horváth, B., Schulze, J., Brinkmann, R. P., Mussenbrock, T., & Wilczek, S. (2023). Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges. Plasma Sources Science and Technology, 32(8), 085008. https://doi.org/10.1088/1361-6595/ace848 Cite
Sun, J.-Y., Zhang, Q.-Z., Schulze, J., & Wang, Y.-N. (2023). Resonant electron confinement and sheath expansion heating in magnetized capacitive oxygen discharges. Plasma Sources Science and Technology, 32(7), 075003. https://doi.org/10.1088/1361-6595/ace1a5 Cite
Ohtsu, Y., Hara, K., Imoto, S., Schulze, J., Yasunaga, T., & Ikegami, Y. (2023). Spatial structures of rf ring-shaped magnetized sputtering plasmas with two facing cylindrical ZnO/Al 2 O 3 targets. Japanese Journal of Applied Physics, 62(SI), SI1007. https://doi.org/10.35848/1347-4065/acc7aa Cite
Ollegott, K., Wirth, P., Oberste-Beulmann, C., Sakthi, G. S. M., Magazova, A., Hermanns, P., Peters, N., Schücke, L., Bracht, V., Agar, D. W., Awakowicz, P., & Muhler, M. (2023). Investigation of flow characteristics in a twin-surface dielectric barrier discharge reactor by Schlieren imaging. Journal of Physics D: Applied Physics, 56(26), 265201. https://doi.org/10.1088/1361-6463/acc956 Cite
Donkó, Z., Hartmann, P., Korolov, I., Schulenberg, D., Rohr, S., Rauf, S., & Schulze, J. (2023). Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge. Plasma Sources Science and Technology, 32(6), 065002. https://doi.org/10.1088/1361-6595/acd6b5 Cite
Gergs, T., Mussenbrock, T., & Trieschmann, J. (2023). Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N 2 discharges on experimental timescales. Journal of Physics D: Applied Physics, 56(19), 194001. https://doi.org/10.1088/1361-6463/acc07e Cite
Feibel, D., Golda, J., Held, J., Awakowicz, P., Schulz-von Der Gathen, V., Suschek, C. V., Opländer, C., & Jansen, F. (2023). Gas Flow-Dependent Modification of Plasma Chemistry in μAPP Jet-Generated Cold Atmospheric Plasma and Its Impact on Human Skin Fibroblasts. Biomedicines, 11(5), 1242. https://doi.org/10.3390/biomedicines11051242 Cite
Bracht, V., Gembus, J.-L., Bibinov, N., & Awakowicz, P. (2023). Surface modifications of aluminium and aluminium oxide induced by a treatment with a He-plasma jet and plasma electrolytic oxidation. Journal of Physics D: Applied Physics, 56(16), 165201. https://doi.org/10.1088/1361-6463/acbd5e Cite
Eremin, D., Kemaneci, E., Matsukuma, M., Mussenbrock, T., & Brinkmann, R. P. (2023). Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code. Plasma Sources Science and Technology, 32(4), 044007. https://doi.org/10.1088/1361-6595/accecb Cite
Eremin, D., Engel, D., Krüger, D., Wilczek, S., Berger, B., Oberberg, M., Wölfel, C., Smolyakov, A., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P. (2023). Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode. Plasma Sources Science and Technology, 32(4), 045007. https://doi.org/10.1088/1361-6595/acc481 Cite
Eremin, D., Berger, B., Engel, D., Kallähn, J., Köhn, K., Krüger, D., Xu, L., Oberberg, M., Wölfel, C., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P. (2023). Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code. Plasma Sources Science and Technology, 32(4), 045008. https://doi.org/10.1088/1361-6595/acc47f Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2023). Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges. Plasma Sources Science and Technology, 32(4), 045002. https://doi.org/10.1088/1361-6595/acc6e9 Cite
Berger, B., Eremin, D., Oberberg, M., Engel, D., Wölfel, C., Zhang, Q.-Z., Awakowicz, P., Lunze, J., Brinkmann, R. P., & Schulze, J. (2023). Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results. Plasma Sources Science and Technology, 32(4), 045009. https://doi.org/10.1088/1361-6595/acc480 Cite
Rauf, S., Schroeder, M., Korolov, I., Kenney, J., & Schulze, J. (2023). Plasma dynamics in a capacitively coupled discharge driven by a combination of a single high frequency and a tailored low frequency rectangular voltage waveform. Plasma Sources Science and Technology, 32(3), 034002. https://doi.org/10.1088/1361-6595/acc12d Cite
Gergs, T., Mussenbrock, T., & Trieschmann, J. (2023). Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges. Journal of Physics D: Applied Physics, 56(8), 084003. https://doi.org/10.1088/1361-6463/acb6a4 Cite
Hartmann, P., Korolov, I., Escandón-López, J., van Gennip, W., Buskes, K., & Schulze, J. (2023). Control of ion flux-energy distribution at dielectric wafer surfaces by low frequency tailored voltage waveforms in capacitively coupled plasmas. Journal of Physics D: Applied Physics, 56(5), 055202. https://doi.org/10.1088/1361-6463/acacaa Cite
Dujko, S., Bošnjaković, D., Vass, M., Hartmann, P., Korolov, I., Pinhão, N. R., Loffhagen, D., & Donkó, Z. (2023). Scanning drift tube measurements and kinetic studies of electron transport in CO. Plasma Sources Science and Technology, 32(2), 025014. https://doi.org/10.1088/1361-6595/acbc96 Cite
Liu, Y., Vass, M., Hübner, G., Schulenberg, D., Hemke, T., Bischoff, L., Chur, S., Steuer, D., Golda, J., Böke, M., Schulze, J., Korolov, I., & Mussenbrock, T. (2023). Local enhancement of electron heating and neutral species generation in radio-frequency micro-atmospheric pressure plasma jets: the effects of structured electrode topologies. Plasma Sources Science and Technology, 32(2), 025012. https://doi.org/10.1088/1361-6595/acb9b8 Cite
Davies, H. L., Guerra, V., van der Woude, M., Gans, T., O’Connell, D., & Gibson, A. R. (2023). Vibrational kinetics in repetitively pulsed atmospheric pressure nitrogen discharges: average-power-dependent switching behaviour. Plasma Sources Science and Technology, 32(1), 014003. https://doi.org/10.1088/1361-6595/aca9f4 Cite
Gergs, T., Mussenbrock, T., & Trieschmann, J. (2023). Charge-optimized many-body interaction potential for AlN revisited to explore plasma–surface interactions. Scientific Reports, 13, 5287. https://doi.org/https://doi.org/10.1038/s41598-023-31862-8 Cite
Mujahid, Z.-I., Korolov, I., Liu, Y., Mussenbrock, T., & Schulze, J. (2022). Propagation dynamics and interaction of multiple streamers at and above adjacent dielectric pellets in a packed bed plasma reactor. Journal of Physics D: Applied Physics, 55(49), 495201. https://doi.org/10.1088/1361-6463/ac99ea Cite
Yarragolla, S., Du, N., Hemke, T., Zhao, X., Chen, Z., Polian, I., & Mussenbrock, T. (2022). Physics inspired compact modelling of $$\hbox {BiFeO}_3$$ based memristors. Scientific Reports, 12(1), 20490. https://doi.org/10.1038/s41598-022-24439-4 Cite
Vass, M., Wang, L., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2022). Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis. Plasma Sources Science and Technology, 31(11), 115004. https://doi.org/10.1088/1361-6595/ac9754 Cite
Steuer, D., van Impel, H., Gibson, A. R., Schulz-von der Gathen, V., Böke, M., & Golda, J. (2022). State enhanced actinometry in the COST microplasma jet. Plasma Sources Science and Technology, 31(10), 10LT01. https://doi.org/10.1088/1361-6595/ac90e8 Cite
Wang, L., Vass, M., Lafleur, T., Donkó, Z., Song, Y.-H., & Schulze, J. (2022). On the validity of the classical plasma conductivity in capacitive RF discharges. Plasma Sources Science and Technology, 31(10), 105013. https://doi.org/10.1088/1361-6595/ac95c1 Cite
Tennyson, J., Mohr, S., Hanicinec, M., Dzarasova, A., Smith, C., Waddington, S., Liu, B., Alves, L. L., Bartschat, K., Bogaerts, A., Engelmann, S. U., Gans, T., Gibson, A. R., Hamaguchi, S., Hamilton, K. R., Hill, C., O’Connell, D., Rauf, S., van ’t Veer, K., & Zatsarinny, O. (2022). The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions. Plasma Sources Science and Technology, 31(9), 095020. https://doi.org/10.1088/1361-6595/ac907e Cite
Ďurian, J., Hartmann, P., Matejčík, Š., Gibson, A. R., & Donkó, Z. (2022). Experimental and simulation study of a capacitively coupled radiofrequency plasma with a structured electrode. Plasma Sources Science and Technology, 31(9), 095001. https://doi.org/10.1088/1361-6595/ac8449 Cite
Gergs, T., Mussenbrock, T., & Trieschmann, J. (2022). Molecular dynamics study on the role of Ar ions in the sputter deposition of Al thin films. Journal of Applied Physics, 132(6), 063302. https://doi.org/10.1063/5.0098040 Cite
Sun, J.-Y., Wen, H., Zhang, Q.-Z., Schulze, J., Liu, Y.-X., & Wang, Y.-N. (2022). Electron heating mode transition induced by the magnetic confinement of secondary electrons in capacitively coupled radio frequency discharges. Plasma Sources Science and Technology, 31(8), 085012. https://doi.org/10.1088/1361-6595/ac882d Cite
Fu, Y.-Y., Wang, X.-K., Liu, Y.-X., Schulze, J., Donkó, Z., & Wang, Y.-N. (2022). Effects of ‘step-like’ amplitude-modulation on a pulsed capacitively coupled RF discharge: an experimental investigation. Plasma Sources Science and Technology, 31(8), 085005. https://doi.org/10.1088/1361-6595/ac81e9 Cite
Ohtsu, Y., Sakata, G., Schulze, J., Yasunaga, T., & Ikegami, Y. (2022). Spatial profile of Al-ZnO thin film on polycarbonate deposited by ring-shaped magnetized rf plasma sputtering with two facing cylindrical Al 2 O 3 – ZnO targets. Japanese Journal of Applied Physics, 61(SI), SI1005. https://doi.org/10.35848/1347-4065/ac4a01 Cite