M. Sc. Stefan Ries

  • Research Assistant - Chair Allgemeine Elektrotechnik und Plasmatechnik
Room
ID 1/527
Phone:
(+49)(0)234 / 32 - 23481
Email:
ries@aept.rub.de

Courses

Publications

2018
The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes

Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz - DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018

2017
Sputtering process data interpreted by heavy particle simulations

Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider, Thomas Mussenbrock - Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

The application of the multipole resonance probe to industrially relevant processes

Moritz Oberberg, Marcel Fiebrandt, Stefan Ries, Christian Wölfel, Peter Awakowicz - 70th Annual Gaseous Electronics Conference, Pittsburgh, USA, 2017

From neutral particles to highly ionized plasmas: Heavy particle transport in technological sputtering systems

Jan Trieschmann, Stefan Ries, Dennis Krüger, Frederik Schmidt, Tobias Gergs, Nikita Bibinov, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock - 18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017 (invited)

2016
Influence of Ion Energy and Ion-to-Growth Flux Ratio on PVD Coatings in a Multi-Frequency Capacitively Coupled Plasma

Stefan Ries, Dario Grochla, Jan Trieschmann, Denis Eremin, Carles Corbella, Thomas Mussenbrock, Alfred Ludwig, Achim von Keudell, Peter Awakowicz - 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego (California), USA, 27. April 2016.

On the physics of a large CCP discharge

Denis Eremin, Stefan Bienholz, Daniel Szeremley, Jan Trieschmann, Stefan Ries, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann - PLASMA SOURCES SCIENCE & TECHNOLOGY Volume: 25 Issue: 2 Article Number: 025020 DOI: 10.1088/0963-0252/25/2/025020 Published: APR 2016

On the physics of a large CCP discharge

Denis Eremin, Stefan Bienholz, Daniel Szeremley, Jan Trieschmann, Stefan Ries, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann - 2016 Plasma Sources Sci. Technol. 25 025020

2015
Kinetische Simulation der Dynamik gesputterten Aluminiums in kapazitiv gekoppelten Mehrfrequenzplasmen

Jan Trieschmann, Stefan Ries, Stefan Bienholz, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock - DPG Früh­jahrs­ta­gung 2015, Bochum, Ger­ma­ny, 2-5 March