M. Sc. Moritz Oberberg

  • Research Assistant - Chair Allgemeine Elektrotechnik und Plasmatechnik
Room
ID 1/523
Phone:
(+49)(0)234 / 32 - 28062
Email:
oberberg@aept.ruhr-uni-bochum.de

Courses

Publications

2020
The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes

Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes - IEEE Transactions on Microwave Theory and Techniques, DOI: 10.1109/TMTT.2020.2974835, April 2020

2019
Untersuchung des Einflusses von Fertigungstoleranzen auf das Messverhalten der Multipol-Resonanz-Sonde

Dennis Pohle, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes - Kleinheubacher Tagung 2019, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 23-25, 2019

Minimally Invasive Supervision of Plasma-assisted Dielectric Deposition Processes

Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes - IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2019), pp. 163-165, DOI: 10.1109/IMWS-AMP.2019.8880124, Bochum, Germany, July 16-18, 2019

Theoretical investigation of the magnetic asymmetry effect by using a lumped element model

Dennis Engel, Moritz Oberberg, Birk Berger, Laura Kroll, Julian Schulze, Peter Awakowicz, Ralf Peter Brinkmann - 2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.

Monitoring of Industrial Plasma Processes Using the Multipole Resonance Probe

Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes - European Microwave Conference in Central Europe (EuMCE), pp. pp. 622-625, Prague, Czech Republic, May 13-15, 2019

2018
A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

Dennis Pohle, Christian Schulz, Moritz Oberberg, Michael Friedrichs, Alexandra Serwa, Peter Uhlig, Jens Oberrath, Peter Awakowicz, Ilona Rolfes - 30th Asia-Pacific Microwave Conference (APMC), pp. 1315-1317, DOI: 10.23919/APMC.2018.8617552, Kyoto, Japan, November 06–09, 2018

Eine temperaturbeständige Sonde für die Plasmadiagnostik in LTCC

Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz - IMAPS-Herbstkonferenz 2018, München, Deutschland, October 18–19, 2018

Progression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology

Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes - 48th European Microwave Conference (EuMC), pp.239-242, DOI: 10.23919/EuMC.2018.8541730, Madrid, Spain, Sep 23-27, 2018

A Temperature Stable Probe for Plasma Diagnostics in LTCC

Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz - IMAPS/ACerS 14th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2018), Aveiro, Portugal, April 18–20, 2018

An Advanced High-temperature Stable Multipole Resonance Probe for Industry Compatible Plasma Diagnostics

Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes - German Microwave Conference (GeMiC 2018), pp. 235-238, doi: 10.23919/GEMIC.2018.8335073, Freiburg, Germany, March 12–14, 2018

The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes

Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz - DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018

2017
The application of the multipole resonance probe to industrially relevant processes

Moritz Oberberg, Marcel Fiebrandt, Stefan Ries, Christian Wölfel, Peter Awakowicz - 70th Annual Gaseous Electronics Conference, Pittsburgh, USA, 2017

Realisierung einer temperaturstabilen Multipol -Resonanz -Sonde in LTCC -Technologie für die Plasmadiagnostik

Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Uhlig, Alexandra Serwa, Peter Awakowicz, Ilona Rolfes - Klein­heu­ba­cher Ta­gung 2017, U.R.S.I. Lan­des­aus­schuss in der Bun­des­re­pu­blik Deutsch­land e.V., Mil­ten­berg, Ger­ma­ny, Sep 25-27, 2017

Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes

Malte Mallach, Moritz Oberberg, Peter Awakowicz, Thomas Musch - 2017 IEEE MTT-S International Microwave Symposium (IMS), Honolulu, HI, USA, 2017, pp. 1022-1025. doi:10.1109/MWSYM.2017.8058765

Efficient model for active control of radio frequency magnetron sputtering

Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann - 18. Fach­ta­gung für Plas­ma­tech­no­lo­gie, Göt­tin­gen, Ger­ma­ny, Fe­bru­ary 20-22, 2017

2016
Global model for active control of capacitive radio frequency magnetron discharges

Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann - 69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.

Collision Frequency Determination of Low-Pressure Plasmas based on RF-Reflectometry

Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes - 46th European Microwave Conference (EuMC), London, United Kingdom, Oct 4-6, 2016

Monitoring of Low Pressure Plasmas with a Calibrated Probe

Jan Niclas Runkel, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes - Ger­man Micro­wa­ve Con­fe­rence (GeMiC 2016), pp. 43-46, doi: 10.1109/GEMIC.2016.7461551, Bo­chum, Ger­ma­ny, March 14-16, 2016

Monitoring of Low Pressure Plasmas with a Calibrated Probe

Jan Niclas Runkel, Christian Schulz, Ilona Rolfes, Moritz Oberberg, Peter Awakowicz - 2016 GERMAN MICROWAVE CONFERENCE (GEMIC) Book Series: German Microwave Conference Pages: 43-46 Published: 2016

Diagnostics of plasma processes based on parallelized spatially resolved in-situ reflection measurements

Christian Schulz, Jan Niclas Runkel, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes - IEEE Transactions on Microwave Theory and Techniques, Vol. 64, No. 2, pp. 616-623; DOI: 10.1109/TMTT.2015.2510653; Feb 2016

Diagnostics of Plasma Processes Based on Parallelized Spatially Resolved In-Situ Reflection Measurements

Christian Schulz, Jan Niclas Runkel, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes - IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES Volume: 64 Issue: 2 Pages: 616-623 DOI: 10.1109/TMTT.2015.2510653 Published: FEB 2016

2015
Control orientated modeling and analysis of a reactive (O2) sputter (Ti) process

Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz - WELTPP-18, Kerkrade, 2015

Nutzung von Plasmadiagnostik zur Regelung eines reaktiven Sputterprozesses

Christian Wölfel, Moritz Oberberg, Dennis Krüger, Jan Lunze, Ralf Peter Brinkmann, Peter Awakowicz - 23. Dresdner Vakuumtechnische Kolloquium (NDVaK) Beschichtung und Modifizierung von Kunststoffoberflächen, Dresden, 2015