Wis­sen­schaft­li­cher Mit­ar­bei­ter

Ruhr-Uni­ver­si­tät Bo­chum
Fakultät für Elektrotechnik und Informationstechnik
Lehr­stuhl für All­ge­mei­ne Elek­tro­tech­nik und Plas­ma­tech­nik (AEPT)
Uni­ver­si­täts­stra­ße 150
D-44801 Bo­chum

ID 1/527

(+49)(0)234 / 32 – 23481





Hermanns, P., Kogelheide, F., Bracht, V., Ries, S., Krüger, F., Böddeker, S., Bibinov, N., & Awakowicz, P. (2021). Formation and behaviour of plasma spots on the surface of titanium film. Journal of Physics D: Applied Physics, 54(8), 085203. https://doi.org/10.1088/1361-6463/abc37e Cite
Banko, L., Ries, S., Grochla, D., Arghavani, M., Salomon, S., Pfetzing-Micklich, J., Kostka, A., Rogalla, D., Schulze, J., Awakowicz, P., & Ludwig, A. (2019). Effects of the Ion to Growth Flux Ratio on the Constitution and Mechanical Properties of Cr 1– x -Al x -N Thin Films. ACS Combinatorial Science, 21(12), 782–793. https://doi.org/10.1021/acscombsci.9b00123 Cite
Ries, S., Banko, L., Hans, M., Primetzhofer, D., Schneider, J. M., Ludwig, A., Awakowicz, P., & Schulze, J. (2019). Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering. Plasma Sources Science and Technology, 28(11), 114001. https://doi.org/10.1088/1361-6595/ab504b Cite
Ries, S., Bibinov, N., Rudolph, M., Schulze, J., Mráz, S., Schneider, J. M., & Awakowicz, P. (2018). Spatially resolved characterization of a dc magnetron plasma using optical emission spectroscopy. Plasma Sources Science and Technology, 27(9), 094001. https://doi.org/10.1088/1361-6595/aad6d9 Cite
Trieschmann, J., Ries, S., Bibinov, N., Awakowicz, P., Mráz, S., Schneider, J. M., & Mussenbrock, T. (2018). Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N 2 plasma. Plasma Sources Science and Technology, 27(5), 054003. https://doi.org/10.1088/1361-6595/aac23e Cite
Engelhardt, M., Ries, S., Hermanns, P., Bibinov, N., & Awakowicz, P. (2017). Modifications of aluminum film caused by micro-plasmoids and plasma spots in the effluent of an argon non-equilibrium plasma jet. Journal of Physics D: Applied Physics, 50(37), 375201. https://doi.org/10.1088/1361-6463/aa802f Cite
Oberberg, M., Ries, S., Bibinov, N., & Awakowicz, P. (2016). Measurements of electron density in different low pressure plasmas using the multipole resonance probe, langmuir probe and optical emission spectroscopy. 2016 IEEE International Conference on Plasma Science (ICOPS), 1–1. https://doi.org/10.1109/PLASMA.2016.7534183 Cite