Li Wang, B. Sc.

Doktorandin

Adresse:
Ruhr-Uni­ver­si­tät Bo­chum
Fakultät für Elektrotechnik und Informationstechnik
Lehr­stuhl für An­ge­wand­te Elek­tro­dy­na­mik und Plas­ma­tech­nik
Uni­ver­si­täts­stra­ße 150
D-44801 Bo­chum

Raum:
ID 1/114

Te­le­fon:
(+49)(0)234 / 32 – 22766

Fax:
(+49)(0)234-32-14230

E-Mail:
wang(at)aept.rub.de

Veröffentlichungen

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D Particle-in-cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas. Plasma Sources Science and Technology, 30(8), 085011. https://doi.org/10.1088/1361-6595/abf206 Cite
Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms. Plasma Sources Science and Technology, 30(5), 054001. https://doi.org/10.1088/1361-6595/abf31d Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite
Wang L., De-Qi W., Chong-Biao T., Yuan-Hong S., You-Nian W., 大连理工大学物理学院, 大连 116024,School of Physics, Dalian University of Technology, Dalian 116024, China, 德国波鸿鲁尔大学电子工程与信息科学学院, 波鸿 D-44780,Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Bochum D-44780, Germany, & 美国密歇根州立大学电子与计算机工程学院, 东兰辛 48823,Department of Electrical and Computer Engineering, Michigan State University, East Lansing 48823, USA. (2021). Electron heating dynamics and plasma parameters control in capacitively coupled plasma. Acta Physica Sinica, 70(9), 095214–095214. https://doi.org/10.7498/aps.70.20210473 Cite
Wang, L., Wen, D.-Q., Hartmann, P., Donkó, Z., Derzsi, A., Wang, X.-F., Song, Y.-H., Wang, Y.-N., & Schulze, J. (2020). Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges. Plasma Sources Science and Technology, 29(10), 105004. https://doi.org/10.1088/1361-6595/abb2e7 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Journal of Applied Physics, 54, 075014. https://doi.org/10.1088/1361-6595/ab9374 Cite
Wang, L., Wen, D.-Q., Zhang, Q.-Z., Song, Y.-H., Zhang, Y.-R., & Wang, Y.-N. (2019). Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges. Plasma Sources Science and Technology, 28(5), 055007. https://doi.org/10.1088/1361-6595/ab17ae Cite
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