Research Area: Plasma Diagnostics and Simulation

The de­ve­lop­ment of novel pro­ces­ses in plas­ma tech­no­lo­gy re­qui­res a deep in­sight into fun­da­men­tals of dif­fe­rent di­sch­ar­ges. To op­ti­mi­ze plas­ma sour­ce's ap­p­li­ca­ti­ons the flu­xes of pho­tons and che­mi­cal­ly ac­tive par­ti­cles to the sur­face of trea­ted ob­jects must be de­ter­mined, i.e. me­a­su­red or cal­cu­la­ted. Our re­se­arch ac­tivi­ties focus on the fol­lowing to­pics:

  • Automatic Langmuir Probe System
  • Multipole Resonance Probe (MRP)
  • Optical Emission Spectroscopy
  • Monte-Carlo Models for Radiative Transfer and Reactive Particles
  • Fluid Models for Plasma-Chemical Phenomens
  • Particle-in-Cell Simulations for the Analysis of the Charged Particle Behavior
  • Chemical Modelling