Katharina Nösges, M.Sc.

Researcher

Address
Ruhr-Uni­ver­si­tät Bo­chum
Fakultät für Elektrotechnik und Informationstechnik
Angewandte Elektrodynamik und Plasmatechnik
Uni­ver­si­täts­stra­ße 150
D-44801 Bo­chum, Germany

Room
ID 1/533

Phone
+49 234 32 29478

Email
noesges(at)aept.rub.de


Publications

Nösges, K., Klich, M., Derzsi, A., Horváth, B., Schulze, J., Brinkmann, R. P., Mussenbrock, T., & Wilczek, S. (2023). Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges. Plasma Sources Science and Technology, 32(8), 085008. https://doi.org/10.1088/1361-6595/ace848 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite
Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Plasma Sources Science and Technology, 54, 075014. https://doi.org/10.1088/1361-6595/ab9374 Cite