A self-consistent global model of surface wave discharges with cylindrical or co-axial structures: Ar or O2 fed with continuous or pulse-modulated power input

Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann

69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 14, 2016


A series of cylindrical and co-axial surface wave discharges fed with either argon or oxygen is modelled by a zero-dimensional global modelling approach. Compared to a recent study of the cylindrical surface-wave discharges (Kemaneci et al 2015 J. Phys. D: Appl. Phys. 48 435203), a self-consistent estimation of the edge-to-center ratios are analytically defined and extended to include the co-axial structures. The simulation results are compared with the experimental data of the considered discharges for continuous and pulse-modulated power input and a good agreement is obtained.