Monitoring of Low Pressure Plasmas with a Calibrated Probe

Jan Niclas Runkel, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

Ger­man Micro­wa­ve Con­fe­rence (GeMiC 2016), pp. 43-46, doi: 10.1109/GEMIC.2016.7461551, Bo­chum, Ger­ma­ny, March 14-16, 2016


In this contribution the use of the planar multipole resonance probe (pMRP) as a monitoring tool for low pressure plasmas is presented. By 3D electromagnetic simulations, the probe's ability to monitor two important plasma parameters is investigated and a full one-port calibration is applied to ensure maximum monitoring precision. Measurements in a double inductively coupled argon plasma confirm the simulation results and prove the suitability of the calibrated pMRP for precise plasma monitoring.

[IEEE Library]