Monitoring of Low Pressure Plasmas with a Calibrated Probe

Jan Niclas Runkel, Christian Schulz, Ilona Rolfes, Moritz Oberberg, Peter Awakowicz

2016 GERMAN MICROWAVE CONFERENCE (GEMIC) Book Series: German Microwave Conference Pages: 43-46 Published: 2016


In this contribution the use of the planar multipole resonance probe (pMRP) as a monitoring tool for low pressure plasmas is presented. By 3D electromagnetic simulations, the probe's ability to monitor two important plasma parameters is investigated and a full one-port calibration is applied to ensure maximum monitoring precision. Measurements in a double inductively coupled argon plasma confirm the simulation results and prove the suitability of the calibrated pMRP for precise plasma monitoring.