An Integrated Atmospheric Microwave Plasma Source

Reinhold Kovacs, Nikita Bibinov, Peter Awakowicz, Porteanu, Horla-Eugen, Silvio Kuehn, Roland Gesche

PLASMA PROCESSES AND POLYMERS 6(Suppl. S), volume 6, S233–S236, 2009, 11th International Conference on Plasma Surface Engineering, Garmisch Partenkirchen, GERMANY, SEP 15-19, 2008


Atmospheric plasma processes become more and more popular in recent times. A new integrated atmospheric plasma source is presented which consists of a microwave resonator combined with a solid-state power oscillator. This allows for a very compact and efficient design of a microwave plasma source without external microwave power supply and matching units. Hydrophobic polymers have to be activated to ensure an effective painting or glueing. The performance of this new plasma source has been investigated with respect to surface activation depending on axial and radial distance to the substrate, process time, process gas, and flow velocity. Several polymeric materials have been compared. Polyethylene, polyamide, polystyrene, polypropylene, polycarbonate, and polytetrafluorineethylene show good activation results. This tool can be used especially for bulky goods and/or mass products, when a vacuum process is not possible or too expensive.