Influence of Ion Energy and Ion-to-Growth Flux Ratio on PVD Coatings in a Multi-Frequency Capacitively Coupled Plasma

Stefan Ries, Dario Grochla, Jan Trieschmann, Denis Eremin, Carles Corbella, Thomas Mussenbrock, Alfred Ludwig, Achim von Keudell, Peter Awakowicz

42nd International Conference on Metallurgical Coatings and Thin Films, San Diego (California), USA, 27. April 2016.