The Influence of gamma- and delta-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas

Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

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