The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

2010 - Dennis Ziegler, Jan Trieschmann, Ralf Peter Brinkmann, Julian Schulze, Uwe Czarnetzki, Egmont Semmler, Peter Awakowicz, Deborah O'Connell, Timo Gans

Plasma Sources Sci. Technol. 19 (2010) [DOI]