Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

2020 - Peter Hartmann, Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Zoltán Juhász, Zoltán Donkó, Aranka Derzsi, Eunwoo Lee, Julian Schulze

Electron dynamics in low pressure capacitively coupled radio frequency discharges

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó

Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure

2020 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes

2020 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE Transactions on Microwave Theory and Techniques, DOI: 10.1109/TMTT.2020.2974835, April 2020 [IEEE Library]