Film deposition on the inner surface of tubes using atmospheric-pressure Ar-CH4, Ar-C2H2 and Ar-C2H2-H-2 plasmas: interpretation of film properties from plasma-chemical kinetics

2012 - Ramasamy Pothiraja, Max Engelhardt, Nikita Bibinov, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 45, Issue: 33, Article Number: 335202, DOI: 10.1088/0022-3727/45/33/335202, Published: AUG 22 2012

Quantitative characterization of a dielectric barrier discharge in air applying non-calibrated spectrometer, current measurement and numerical simulation

2012 - Priyadarshini Rajasekaran, Nikita Bibinov, Peter Awakowicz

MEASUREMENT SCIENCE & TECHNOLOGY, Volume: 23, Issue: 8, Article Number: 085605, DOI: 10.1088/0957-0233/23/8/085605, Published: AUG 2012

Dual frequency capacitive plasmas in Fe and Ni sputter applications: correlation of discharge properties on thin film properties

2012 - Stefan Bienholz, Egmont Semmler, Peter Awakowicz, H Brunken, A Ludwig

PLASMA SOURCES SCIENCE & TECHNOLOGY, Volume: 21, Issue: 1, Article Number: 015010, DOI: 10.1088/0963-0252/21/1/015010, Published: FEB 2012