The Multipole Resonance Probe: Investigation of an Active Plasma Resonance Probe Using 3D-electromagnetic Field Simulations

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

42nd European Microwave Week, pp. 566-569 Amsterdam, The Netherlands, Oct 28 – Nov 2, 2012 [IEEE-Library]

A Novel Radio-Frequency Plasma Probe for Monitoring Systems in Dielectric Deposition Processes

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

International Conference on Electromagnetics in Advanced Applications (ICEAA '12), pp. 728-731, DOI: 10.1109/ICEAA.2012.6328725, Cape Town, South Africa, Sep 2-7, 2012 [IEEE-Library]