Publications

Modeling of high-frequency driven discharges at medium and high pressure

2008 - Philipp Mertmann, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann

61st Annual Gaseous Electronics Conference, Dallas, Texas

Modelling and Simulation of multi-frequency capacitive discharges

2008 - Stefan Bienholz, Philipp Mertmann, Peter Awakowicz, Ralf Peter Brinkmann

61st Annual Gaseous Electronics Conference, Dallas, Texas

Plasma and thin film growth control in dual frequency driven capacitive discharges

2008 - Egmont Semmler, D. O'Connell, T. Gans, A. Yüce, Peter Awakowicz, A. von Keudell

Eleventh International Conference on Plasma Surface Engineering, PSE 2008
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