Publications
Sputter processes in capacitively coupled multi frequency discharges
2009 - Stefan Bienholz, Egmont Semmler, Peter Awakowicz
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYModeling of high-frequency driven discharges at medium and high pressure
2008 - Philipp Mertmann, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann
61st Annual Gaseous Electronics Conference, Dallas, TexasModelling and Simulation of multi-frequency capacitive discharges
2008 - Stefan Bienholz, Philipp Mertmann, Peter Awakowicz, Ralf Peter Brinkmann
61st Annual Gaseous Electronics Conference, Dallas, TexasPlasma and thin film growth control in dual frequency driven capacitive discharges
2008 - Egmont Semmler, D. O'Connell, T. Gans, A. Yüce, Peter Awakowicz, A. von Keudell
Eleventh International Conference on Plasma Surface Engineering, PSE 2008