A global model of a dual frequency capacitive discharge considering the nonlinearity of the sheath and a bulk-chemestry

2007 - Philipp Mertmann, Thomas Mussenbrock, Ralf Peter Brinkmann, Peter Awakowicz

60th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Ar­ling­ton (Vir­gi­nia), USA, 02-05 Oc­to­ber