Publications

Basic research of electron dynamics in low pressure capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann, Thomas Mussenbrock

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring

2020 - Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Thomas Mussenbrock, Zoltán Donkó, Aranka Derzsi, Peter Hartmann

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Electrostatic wave propagation in the presence of secondary electrons in low pressure capacitively coupled plasmas

2020 - Katharina Nösges, Julian Schulze, Máté Vass, Zoltán Donkó, Peter Hartmann, Thomas Mussenbrock, Ralf Peter Brinkmann, Sebastian Wilczek

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

The difference between electron heating and power absorption in capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann, Thomas Mussenbrock

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles

2020 - Dennis Pohle, Felix Mitschker, Jonathan Jenderny, Marcel Rudolph, Christian Schulz, Peter Awakowicz, Ilona Rolfes

accepted in European Microwave Conference 2020, Utrecht, Netherlands, 2020
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