Publications
Neural network based linearization and control of sputter processes
2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze
Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017Control-oriented modeling and stabilization of reactive sputter processes
2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze
16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas
2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltan Donko
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen
2017 - Efe Kemaneci, Ralf Peter Brinkmann, Felix Mitschker, Peter Awakowicz
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017Comparison of Zero Dimensional Plasma Chemistry Model with Ozone Absorption Spectroscopy Measurements
2017 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Friederike Kogelheide, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Katharina Stapelmann
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017Differences Between Cartesian and Spherical 1d3v Particle-in-Cell Simulations
2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltan Donko
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 7, 2017Sputtering process data interpreted by heavy particle simulations
2017 - Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider
Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017The application of the multipole resonance probe to industrially relevant processes
2017 - Moritz Oberberg, Marcel Fiebrandt, Stefan Ries, Christian Wölfel, Peter Awakowicz
70th Annual Gaseous Electronics Conference, Pittsburgh, USA, 2017The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges
2017 - Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltan Donko, Julian Schulze
Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017Model identification of nonlinear sputter processes
2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze
C. Wölfel, S. Kockmann, P. Awakowicz, J. Lunze: Model identification of nonlinear sputter processes Proc. of the 17th International Conference on Control, Automation and Systems, pp. 182-187, Jeju, Korea, 2017.Realisierung einer temperaturstabilen Multipol -Resonanz -Sonde in LTCC -Technologie für die Plasmadiagnostik
2017 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Uhlig, Alexandra Serwa, Peter Awakowicz, Ilona Rolfes
Kleinheubacher Tagung 2017, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 25-27, 2017Ein Ansatz zur Modellierung und Regelung reaktiver Zerstäubungsprozesse
2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze
GMA-FA 1.30 Modellbildung, Identifikation und Simulation in der Automatisierungstechnik, Anif, 2017Robust high-gain control of nonlinear reactive sputter processes
2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze
Proc. of the 1st IEEE Conference on Control Technology and Applications, pp. 25-30, Hawai'i, USA, 2017Fine Structure of Ionisation Patterns and Confinement of Energetic Electrons in Asymmetric Capacitive Radio Frequency Discharges
2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Donkó, Zoltán
ICPIG 2017, Estoril/Lisbon, Portugal, July 9-14 [Poster_ICPIG]Model reduction and identification of nonlinear reactive sputter processes
2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze
Proc. of the 20th IFAC World Congress, pp. 14292-14298, Toulouse, France, 2017Tuning Rule for Linear Control of Nonlinear Reactive Sputter Processes
2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze
Proc. of the 21st International Conference on Process Control (PC), pp. 109-114, Štrbské Pleso, Slovakia, 2017Effects of fast neutrals and energy-dependent secondary electron emission yield in PIC/MCC simulations of single- and dual-frequency CCPs
2017 - Aranka Derzsi, Ihor Korolov, Edmund Schüngel, Manaswi Daksha, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltán Donkó, Julian Schulze
invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017Nonlinear Dynamics in Asymmetric and Symmetric Capacitivley Coupled Radio Frequency Discharges
2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó
invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017 [Abstract]Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes
2017 - Malte Mallach, Moritz Oberberg, Peter Awakowicz, Thomas Musch
2017 IEEE MTT-S International Microwave Symposium (IMS), Honolulu, HI, USA, 2017, pp. 1022-1025. doi:10.1109/MWSYM.2017.8058765From neutral particles to highly ionized plasmas: Heavy particle transport in technological sputtering systems
2017 - Jan Trieschmann, Stefan Ries, Dennis Krüger, Frederik Schmidt, Tobias Gergs, Nikita Bibinov, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann
18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017 (invited)Efficient model for active control of radio frequency magnetron sputtering
2017 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann
18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017Electron Heating in Voltage and Current Driven Asymmetric Capacitive RF Discharges
2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Donkó, Zoltán
21st Symposium on Application of Plasma Processes (SAPP) 13-18 January 2017, Štrbské Pleso, Slovakia