Publications

Kinetische Simulation der Dynamik gesputterten Aluminiums in kapazitiv gekoppelten Mehrfrequenzplasmen

2015 - Jan Trieschmann, Stefan Ries, Stefan Bienholz, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2015, Bochum, Ger­ma­ny, 2-5 March

Kinetic simulation of neutral particle transport in sputtering processes

2013 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Thomas Mussenbrock, Stefan Ries, Nikita Bibinov, Peter Awakowicz

66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Princeton (New Jersey), USA, 30 September - 04 Oc­to­ber
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