Publications

Monitoring of Low Pressure Plasmas with a Calibrated Probe

2016 - Jan Niclas Runkel, Christian Schulz, Ilona Rolfes, Moritz Oberberg, Peter Awakowicz

2016 GERMAN MICROWAVE CONFERENCE (GEMIC) Book Series: German Microwave Conference Pages: 43-46 Published: 2016

Control orientated modeling and analysis of a reactive (O2) sputter (Ti) process

2015 - Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz

WELTPP-18, Kerkrade, 2015

Ion Energy Distribution Functions in a Microwave Driven Plasma Discharge

2015 - Daniel Szeremley, Felix Mitschker, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner, Thomas Mussenbrock

68th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence/9th In­ter­na­tio­nal Con­fe­rence on Re­ac­tive Plas­mas/33rd Sym­po­si­um on Plas­ma Pro­ces­sing, Ho­no­lu­lu, USA, Oc­to­ber 12-15 2015 (oral contribution)

Nutzung von Plasmadiagnostik zur Regelung eines reaktiven Sputterprozesses

2015 - Christian Wölfel, Moritz Oberberg, Dennis Krüger, Jan Lunze, Ralf Peter Brinkmann, Peter Awakowicz

23. Dresdner Vakuumtechnische Kolloquium (NDVaK) Beschichtung und Modifizierung von Kunststoffoberflächen, Dresden, 2015

Kinetische Simulation der Dynamik gesputterten Aluminiums in kapazitiv gekoppelten Mehrfrequenzplasmen

2015 - Jan Trieschmann, Stefan Ries, Stefan Bienholz, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2015, Bochum, Ger­ma­ny, 2-5 March

Supervision and Control of Medical Sterilization Processes Utilizing the Multipole Resonance Probe

2013 - Christian Schulz, Tim Styrnoll, Peter Awakowicz, Ilona Rolfes

IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO 2013), pp. 1-3, DOI: 10.1109/IMWS-BIO.2013.6756158, Singapore, Dec 9 – 11, 2013 [IEEE-Library]

The importance of Ion energy distribution functions at the inner surface of a PET bottle

2013 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann, Mark J. Kushner, Thomas Mussenbrock

WELT­PP-16, Kerk­ra­de, The Nether­lands, 21-22 No­vem­ber

The Multipole Resonance Probe: Evolution of a Plasma Sensor

2013 - Christian Schulz, Tim Styrnoll, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

IEEE Sensors, pp. 1-4, DOI: 10.1109/ICSENS.2013.6688324, Baltimore, Maryland, USA, Nov 3–6, 2013 [IEEE-Library]

Kinetic simulation of neutral particle transport in sputtering processes

2013 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Thomas Mussenbrock, Stefan Ries, Nikita Bibinov, Peter Awakowicz

66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Princeton (New Jersey), USA, 30 September - 04 Oc­to­ber

Kinetic Simulations of a Large-Sized Multifrequency CCP-Based Sputtering Source with a PIC/MCC Darwin Code

2013 - Denis Eremin, Stefan Bienholz, Daniel Szeremley, Torben Hemke, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

40th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS) & Pul­sed Power and Plas­ma Sci­ence (PPPS) 2013, San Fran­cis­co (Ca­li­for­nia), USA, 17-21 June
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