Numerical simulations of a microwave driven low pressure plasma

2016 - Daniel Szeremley, Thomas Mussenbrock, Ralf Peter Brinkmann, Felix Mitschker, Simon Steves, Peter Awakowicz, Mark J. Kushner, Denis Eremin

43nd IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS), Banff, Kanada, June 19-23, 2016 (oral cont­ri­bu­ti­on)

Zero dimensional model atmospheric SMD discharge and afterglow in humid air

2016 - Ryan T Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann

ICOPS 2016, Banff, Alberta, Canada, June 19-23 2016

Influence of Ion Energy and Ion-to-Growth Flux Ratio on PVD Coatings in a Multi-Frequency Capacitively Coupled Plasma

2016 - Stefan Ries, Dario Grochla, Jan Trieschmann, Denis Eremin, Carles Corbella, Thomas Mussenbrock, Alfred Ludwig, Achim von Keudell, Peter Awakowicz

42nd International Conference on Metallurgical Coatings and Thin Films, San Diego (California), USA, 27. April 2016.

Monitoring of Low Pressure Plasmas with a Calibrated Probe

2016 - Jan Niclas Runkel, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

Ger­man Micro­wa­ve Con­fe­rence (GeMiC 2016), pp. 43-46, doi: 10.1109/GEMIC.2016.7461551, Bo­chum, Ger­ma­ny, March 14-16, 2016 [IEEE Library]

Monitoring of Low Pressure Plasmas with a Calibrated Probe

2016 - Jan Niclas Runkel, Christian Schulz, Ilona Rolfes, Moritz Oberberg, Peter Awakowicz

2016 GERMAN MICROWAVE CONFERENCE (GEMIC) Book Series: German Microwave Conference Pages: 43-46 Published: 2016

Control orientated modeling and analysis of a reactive (O2) sputter (Ti) process

2015 - Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz

WELTPP-18, Kerkrade, 2015

Ion Energy Distribution Functions in a Microwave Driven Plasma Discharge

2015 - Daniel Szeremley, Felix Mitschker, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner, Thomas Mussenbrock

68th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence/9th In­ter­na­tio­nal Con­fe­rence on Re­ac­tive Plas­mas/33rd Sym­po­si­um on Plas­ma Pro­ces­sing, Ho­no­lu­lu, USA, Oc­to­ber 12-15 2015 (oral contribution)

Nutzung von Plasmadiagnostik zur Regelung eines reaktiven Sputterprozesses

2015 - Christian Wölfel, Moritz Oberberg, Dennis Krüger, Jan Lunze, Ralf Peter Brinkmann, Peter Awakowicz

23. Dresdner Vakuumtechnische Kolloquium (NDVaK) Beschichtung und Modifizierung von Kunststoffoberflächen, Dresden, 2015

Kinetische Simulation der Dynamik gesputterten Aluminiums in kapazitiv gekoppelten Mehrfrequenzplasmen

2015 - Jan Trieschmann, Stefan Ries, Stefan Bienholz, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2015, Bochum, Ger­ma­ny, 2-5 March

Supervision and Control of Medical Sterilization Processes Utilizing the Multipole Resonance Probe

2013 - Christian Schulz, Tim Styrnoll, Peter Awakowicz, Ilona Rolfes

IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO 2013), pp. 1-3, DOI: 10.1109/IMWS-BIO.2013.6756158, Singapore, Dec 9 – 11, 2013 [IEEE-Library]