Veröffentlichungen

A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Michael Friedrichs, Alexandra Serwa, Peter Uhlig, Jens Oberrath, Peter Awakowicz, Ilona Rolfes

30th Asia-Pacific Microwave Conference (APMC), pp. 1315-1317, DOI: 10.23919/APMC.2018.8617552, Kyoto, Japan, November 06–09, 2018 [IEEE Library]

Eine temperaturbeständige Sonde für die Plasmadiagnostik in LTCC

2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz

IMAPS-Herbstkonferenz 2018, München, Deutschland, October 18–19, 2018

Progression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology

2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes

48th European Microwave Conference (EuMC), pp.239-242, DOI: 10.23919/EuMC.2018.8541730, Madrid, Spain, Sep 23-27, 2018 [IEEE Library]

A Temperature Stable Probe for Plasma Diagnostics in LTCC

2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz

IMAPS/ACerS 14th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2018), Aveiro, Portugal, April 18–20, 2018

An Advanced High-temperature Stable Multipole Resonance Probe for Industry Compatible Plasma Diagnostics

2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes

German Microwave Conference (GeMiC 2018), pp. 235-238, doi: 10.23919/GEMIC.2018.8335073, Freiburg, Germany, March 12–14, 2018 [IEEE Library]

The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes

2018 - Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz

DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018

Neural network based linearization and control of sputter processes

2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze

Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017

Control-oriented modeling and stabilization of reactive sputter processes

2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze

16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017

The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas

2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko

70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017

A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen

2017 - Efe Kemaneci, Ralf Peter Brinkmann, Felix Mitschker, Peter Awakowicz

70th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Pitts­burgh (Penn­syl­va­nia), USA, No­vem­ber 8, 2017
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