Publications

Characterization of a new VHF-CCP for Sterilization

2009 - Katharina Stapelmann, Nikita Bibinov, J. Wunderlich, Peter Awakowicz

62nd Annual Gaseous Electronics Conference, Saratoga Springs, NY

Development and characterization of a new VHF-CCP for Sterilization

2009 - Katharina Stapelmann, Nikita Bibinov, Peter Awakowicz

Proceedings ISPC 19, Bochum, 2009, 549
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