Publications

Influence of frequency and relative phase effects in dual frequency capacitive discharges on thin film deposition behavior

2009 - Egmont Semmler, Dennis Ziegler, Thomas Mussenbrock, D. O' Connel, Timo Gans, Peter Awakowicz, Achim von Keudell, Ralf Peter Brinkmann

2nd Workshop on Radio-Frequency Discharges, La Badine - Presquile de Giens, France (2009)
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