Publications

Diagnostics of plasma processes based on parallelized spatially resolved in-situ reflection measurements

2016 - Christian Schulz, Jan Niclas Runkel, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE Transactions on Microwave Theory and Techniques, Vol. 64, No. 2, pp. 616-623; DOI: 10.1109/TMTT.2015.2510653; Feb 2016 [IEEE Library]
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