Publications

On the physics of a large CCP discharge

2016 - Denis Eremin, Stefan Bienholz, Daniel Szeremley, Jan Trieschmann, Stefan Ries, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

2016 Plasma Sources Sci. Technol. 25 025020

Diagnostics of plasma processes based on parallelized spatially resolved in-situ reflection measurements

2016 - Christian Schulz, Jan Niclas Runkel, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE Transactions on Microwave Theory and Techniques, Vol. 64, No. 2, pp. 616-623; DOI: 10.1109/TMTT.2015.2510653; Feb 2016 [IEEE Library]
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