Publications

The Multipole Resonance Probe: Investigation of an Active Plasma Resonance Probe Using 3D-electromagnetic Field Simulations

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

42nd European Microwave Week, pp. 566-569 Amsterdam, The Netherlands, Oct 28 – Nov 2, 2012 [IEEE-Library]

A Novel Radio-Frequency Plasma Probe for Monitoring Systems in Dielectric Deposition Processes

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

International Conference on Electromagnetics in Advanced Applications (ICEAA '12), pp. 728-731, DOI: 10.1109/ICEAA.2012.6328725, Cape Town, South Africa, Sep 2-7, 2012 [IEEE-Library]

Film deposition on the inner surface of tubes using atmospheric-pressure Ar-CH4, Ar-C2H2 and Ar-C2H2-H-2 plasmas: interpretation of film properties from plasma-chemical kinetics

2012 - Ramasamy Pothiraja, Max Engelhardt, Nikita Bibinov, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 45, Issue: 33, Article Number: 335202, DOI: 10.1088/0022-3727/45/33/335202, Published: AUG 22 2012

Quantitative characterization of a dielectric barrier discharge in air applying non-calibrated spectrometer, current measurement and numerical simulation

2012 - Priyadarshini Rajasekaran, Nikita Bibinov, Peter Awakowicz

MEASUREMENT SCIENCE & TECHNOLOGY, Volume: 23, Issue: 8, Article Number: 085605, DOI: 10.1088/0957-0233/23/8/085605, Published: AUG 2012

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

2012 - Ralf Peter Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz

PCT/DE2011/001802, R. P. Brinkmann, J. Oberrath, P. Awakowicz, M. Lapke, T. Musch, T. Mussenbrock, I. Rolfes, C. Schulz, R. Storch, T. Styrnoll, C. Zietz (Erfinder), Ruhr-Universität Bochum (Anmelder), Offenlegung 12.04.2012

Dual frequency capacitive plasmas in Fe and Ni sputter applications: correlation of discharge properties on thin film properties

2012 - Stefan Bienholz, Egmont Semmler, Peter Awakowicz, H Brunken, A Ludwig

PLASMA SOURCES SCIENCE & TECHNOLOGY, Volume: 21, Issue: 1, Article Number: 015010, DOI: 10.1088/0963-0252/21/1/015010, Published: FEB 2012
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