Publications
Modeling of high-frequency driven discharges at medium and high pressure
2008 - Philipp Mertmann, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann
61st Annual Gaseous Electronics Conference, Dallas, TexasModelling and Simulation of multi-frequency capacitive discharges
2008 - Stefan Bienholz, Philipp Mertmann, Peter Awakowicz, Ralf Peter Brinkmann
61st Annual Gaseous Electronics Conference, Dallas, TexasPlasma and thin film growth control in dual frequency driven capacitive discharges
2008 - Egmont Semmler, D. O'Connell, T. Gans, A. Yüce, Peter Awakowicz, A. von Keudell
Eleventh International Conference on Plasma Surface Engineering, PSE 2008The role of the relative voltage and phase for frequency coupling in a dual-frequency capacitively coupled plasma
2008 - Deborah O'Connell, Egmont Semmler, Peter Awakowicz
Appl. Phys. Lett. 93 (2008) [Permalink]