The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

2010 - Dennis Ziegler, Jan Trieschmann, Thomas Mussenbrock, Ralf Peter Brinkmann, Julian Schulze, Uwe Czarnetzki, Egmont Semmler, Peter Awakowicz, Deborah O'Connell, Timo Gans

Plasma Sources Sci. Technol. 19 (2010) [DOI]

Sputter processes in capacitively coupled multi frequency discharges

2009 - Stefan Bienholz, Egmont Semmler, Peter Awakowicz

62nd Annual Gaseous Electronics Conference, Saratoga Springs, NY

Modeling of high-frequency driven discharges at medium and high pressure

2008 - Philipp Mertmann, Stefan Bienholz, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

61st Annual Gaseous Electronics Conference, Dallas, Texas

Modelling and Simulation of multi-frequency capacitive discharges

2008 - Stefan Bienholz, Philipp Mertmann, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

61st Annual Gaseous Electronics Conference, Dallas, Texas

Plasma and thin film growth control in dual frequency driven capacitive discharges

2008 - Egmont Semmler, D. O'Connell, T. Gans, A. Yüce, Peter Awakowicz, A. von Keudell

Eleventh International Conference on Plasma Surface Engineering, PSE 2008

The role of the relative voltage and phase for frequency coupling in a dual-frequency capacitively coupled plasma

2008 - Deborah O'Connell, Egmont Semmler, Peter Awakowicz

Appl. Phys. Lett. 93 (2008) [Permalink]