Veröffentlichungen
The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges
2010 - Dennis Ziegler, Jan Trieschmann, Thomas Mussenbrock, Ralf Peter Brinkmann, Julian Schulze, Uwe Czarnetzki, Egmont Semmler, Peter Awakowicz, Deborah O'Connell, Timo Gans
Plasma Sources Sci. Technol. 19 (2010) [DOI]Sputter processes in capacitively coupled multi frequency discharges
2009 - Stefan Bienholz, Egmont Semmler, Peter Awakowicz
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYModeling of high-frequency driven discharges at medium and high pressure
2008 - Philipp Mertmann, Stefan Bienholz, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann
61st Annual Gaseous Electronics Conference, Dallas, TexasModelling and Simulation of multi-frequency capacitive discharges
2008 - Stefan Bienholz, Philipp Mertmann, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann
61st Annual Gaseous Electronics Conference, Dallas, TexasPlasma and thin film growth control in dual frequency driven capacitive discharges
2008 - Egmont Semmler, D. O'Connell, T. Gans, A. Yüce, Peter Awakowicz, A. von Keudell
Eleventh International Conference on Plasma Surface Engineering, PSE 2008The role of the relative voltage and phase for frequency coupling in a dual-frequency capacitively coupled plasma
2008 - Deborah O'Connell, Egmont Semmler, Peter Awakowicz
Appl. Phys. Lett. 93 (2008) [Permalink]