Disparity between current and voltage driven capacitively coupled radio frequency discharges

2018 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Donkó, Zoltán, Ralf Peter Brinkmann

Plasma Sources Science and Technology, Accepted Manuscript online 2 October 2018 https://doi.org/10.1088/1361-6595/aae5c1

Multi frequency matching for voltage waveform tailoring

2018 - Frederik Schmidt, Julian Schulze, Erik Johnson, Jean-Paul Booth, Douglas Keil, David M French, Jan Trieschmann

Plas­ma Sour­ces Sci­ence and Tech­no­lo­gy, Vo­lu­me 27, Num­ber 9 http://iopscience.iop.org/article/10.1088/1361-6595/aad2cd

Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation

2018 - Julian Schulze, Zoltán Donkó, Trevor Lafleur, Sebastian Wilczek, Ralf Peter Brinkmann

Plasma Sources Science and Technology, Volume 27, Number 5 http://iopscience.iop.org/article/10.1088/1361-6595/aabebc/meta