Publications

Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

2020 - Peter Hartmann, Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Zoltán Juhász, Zoltán Donkó, Aranka Derzsi, Eunwoo Lee, Julian Schulze

https://doi.org/10.1088/1361-6595/ab9374

Electron dynamics in low pressure capacitively coupled radio frequency discharges

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó

https://doi.org/10.1063/5.0003114

Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure

2020 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

https://doi.org/10.1088/1361-6595/aba111

The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes

2020 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE Transactions on Microwave Theory and Techniques, DOI: 10.1109/TMTT.2020.2974835, April 2020 [IEEE Library]

Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

2019 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

Plasma Sources Science and Technology

Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches

2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze

Plasma Sources Science and Technology, Volume 28, Number 7

Disparity between current and voltage driven capacitively coupled radio frequency discharges

2018 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Donkó, Zoltán, Ralf Peter Brinkmann

Plasma Sources Science and Technology, Accepted Manuscript online 2 October 2018 https://doi.org/10.1088/1361-6595/aae5c1

Multi frequency matching for voltage waveform tailoring

2018 - Frederik Schmidt, Julian Schulze, Erik Johnson, Jean-Paul Booth, Douglas Keil, David M French, Jan Trieschmann

Plas­ma Sour­ces Sci­ence and Tech­no­lo­gy, Vo­lu­me 27, Num­ber 9 http://iopscience.iop.org/article/10.1088/1361-6595/aad2cd

Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation

2018 - Julian Schulze, Zoltán Donkó, Trevor Lafleur, Sebastian Wilczek, Ralf Peter Brinkmann

Plasma Sources Science and Technology, Volume 27, Number 5 http://iopscience.iop.org/article/10.1088/1361-6595/aabebc/meta

The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas

2017 - Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltán Donkó, Julian Schulze

2017 Plasma Sources Sci. Technol. 26 085006 [Link]
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