Publications

Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

2020 - Peter Hartmann, Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Zoltán Juhász, Zoltán Donkó, Aranka Derzsi, Eunwoo Lee, Julian Schulze

https://doi.org/10.1088/1361-6595/ab9374

Electron dynamics in low pressure capacitively coupled radio frequency discharges

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó

https://doi.org/10.1063/5.0003114

Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure

2020 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

https://doi.org/10.1088/1361-6595/aba111

The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes

2020 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE Transactions on Microwave Theory and Techniques, DOI: 10.1109/TMTT.2020.2974835, April 2020 [IEEE Library]
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