Publications

The effect of realistic surface coefficients on the electron dynamics and process control in simulations of capacitive RF plasmas

2016 - Daksha, Manaswi, Birk Berger, Julian Schulze, Derzsi, Aranka, Korolov, Ihor, Donkó, Zoltán, Sebastian Wilczek

69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.

Voltage vs. Current Driven CCRF Discharges: Differences in Electron and Ion Dynamics

2016 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Derzsi, Aranka, Hartmann, Peter, Donkó, Zoltán

69th Annual Gaseous Electronics Conference, Bochum, Germany, October 14, 2016. [GEC2016_Slides]

Global model for active control of capacitive radio frequency magnetron discharges

2016 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann

69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.

A self-consistent global model of surface wave discharges with cylindrical or co-axial structures: Ar or O2 fed with continuous or pulse-modulated power input

2016 - Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann

69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 14, 2016

Zero dimensional model of atmospheric SMD discharge and afterglow in humid air

2016 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann

69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 14, 2016

Collision Frequency Determination of Low-Pressure Plasmas based on RF-Reflectometry

2016 - Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

46th European Microwave Conference (EuMC), London, United Kingdom, Oct 4-6, 2016

Numerical simulations of a microwave driven low pressure plasma

2016 - Daniel Szeremley, Ralf Peter Brinkmann, Felix Mitschker, Simon Steves, Peter Awakowicz, Mark J. Kushner, Denis Eremin

43nd IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS), Banff, Kanada, June 19-23, 2016 (oral cont­ri­bu­ti­on)

Hysteresis Effects and Confinement of Beam Electrons in Capacitive Discharges

2016 - Sebastian Wilczek, Jan Trieschmann, Ralf Peter Brinkmann, Julian Schulze, Schüngel, Edmund, Derzsi, Aranka, Korolov, Ihor, Hartmann, Peter, Donkó, Zoltán

ICOPS 2016, Banff, Alberta, Canada, June 19-23 2016 (invited)

Zero dimensional model atmospheric SMD discharge and afterglow in humid air

2016 - Ryan T Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann

ICOPS 2016, Banff, Alberta, Canada, June 19-23 2016

Influence of Ion Energy and Ion-to-Growth Flux Ratio on PVD Coatings in a Multi-Frequency Capacitively Coupled Plasma

2016 - Stefan Ries, Dario Grochla, Jan Trieschmann, Denis Eremin, Carles Corbella, Alfred Ludwig, Achim von Keudell, Peter Awakowicz

42nd International Conference on Metallurgical Coatings and Thin Films, San Diego (California), USA, 27. April 2016.

Monitoring of Low Pressure Plasmas with a Calibrated Probe

2016 - Jan Niclas Runkel, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

Ger­man Micro­wa­ve Con­fe­rence (GeMiC 2016), pp. 43-46, doi: 10.1109/GEMIC.2016.7461551, Bo­chum, Ger­ma­ny, March 14-16, 2016 [IEEE Library]

Monitoring of Low Pressure Plasmas with a Calibrated Probe

2016 - Jan Niclas Runkel, Christian Schulz, Ilona Rolfes, Moritz Oberberg, Peter Awakowicz

2016 GERMAN MICROWAVE CONFERENCE (GEMIC) Book Series: German Microwave Conference Pages: 43-46 Published: 2016

Control orientated modeling and analysis of a reactive (O2) sputter (Ti) process

2015 - Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz

WELTPP-18, Kerkrade, 2015

Ion Energy Distribution Functions in a Microwave Driven Plasma Discharge

2015 - Daniel Szeremley, Felix Mitschker, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner

68th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence/9th In­ter­na­tio­nal Con­fe­rence on Re­ac­tive Plas­mas/33rd Sym­po­si­um on Plas­ma Pro­ces­sing, Ho­no­lu­lu, USA, Oc­to­ber 12-15 2015 (oral contribution)

Nutzung von Plasmadiagnostik zur Regelung eines reaktiven Sputterprozesses

2015 - Christian Wölfel, Moritz Oberberg, Dennis Krüger, Jan Lunze, Ralf Peter Brinkmann, Peter Awakowicz

23. Dresdner Vakuumtechnische Kolloquium (NDVaK) Beschichtung und Modifizierung von Kunststoffoberflächen, Dresden, 2015

Nonlinear Electron Resonance Heating in Capacitive Discharges

2015 - Sebastian Wilczek, Jan Trieschmann, Denis Eremin, Ralf Peter Brinkmann, Julian Schulze, Derzsi, Aranka, Korolov, Ihor, Hartmann, Peter, Donkó, Zoltán

NCPST 5th Radio Frequency Discharges Workshop 2015, Dublin, Ireland, June 22-23 2015

Kinetische Simulation der Dynamik gesputterten Aluminiums in kapazitiv gekoppelten Mehrfrequenzplasmen

2015 - Jan Trieschmann, Stefan Ries, Stefan Bienholz, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann

DPG Früh­jahrs­ta­gung 2015, Bochum, Ger­ma­ny, 2-5 March

Supervision and Control of Medical Sterilization Processes Utilizing the Multipole Resonance Probe

2013 - Christian Schulz, Tim Styrnoll, Peter Awakowicz, Ilona Rolfes

IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO 2013), pp. 1-3, DOI: 10.1109/IMWS-BIO.2013.6756158, Singapore, Dec 9 – 11, 2013 [IEEE-Library]

The importance of Ion energy distribution functions at the inner surface of a PET bottle

2013 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann, Mark J. Kushner

WELT­PP-16, Kerk­ra­de, The Nether­lands, 21-22 No­vem­ber

The Multipole Resonance Probe: Evolution of a Plasma Sensor

2013 - Christian Schulz, Tim Styrnoll, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

IEEE Sensors, pp. 1-4, DOI: 10.1109/ICSENS.2013.6688324, Baltimore, Maryland, USA, Nov 3–6, 2013 [IEEE-Library]

Kinetic simulation of neutral particle transport in sputtering processes

2013 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz

66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Princeton (New Jersey), USA, 30 September - 04 Oc­to­ber

Kinetic Simulations of a Large-Sized Multifrequency CCP-Based Sputtering Source with a PIC/MCC Darwin Code

2013 - Denis Eremin, Stefan Bienholz, Daniel Szeremley, Torben Hemke, Peter Awakowicz, Ralf Peter Brinkmann

40th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS) & Pul­sed Power and Plas­ma Sci­ence (PPPS) 2013, San Fran­cis­co (Ca­li­for­nia), USA, 17-21 June

Analyse der Ausbreitung von Mikrowellen in einem Plasma

2013 - Daniel Szeremley, Ralf Peter Brinkmann, Simon Steves, Peter Awakowicz, Mark J. Kushner

DPG Früh­jahrs­ta­gung 2013, Jena, Ger­ma­ny, 25 February - 01 March, oral contribution

Simulationen zur Gasdynamik in Sputterprozessen

2013 - Jan Trieschmann, Ralf Peter Brinkmann, Stefan Bienholz, Peter Awakowicz, Ricardo Henrique Brugnara, Nazlim Bagcivan, Kirsten Bobzin

DPG Früh­jahrs­ta­gung 2013, Jena, Ger­ma­ny, 25 February - 01 March

Diagnostik und Steuerung von PIAD-Prozessen

2013 - Jens Harhausen, Rüdiger Foest, Andreas Ohl, Dieter Gäbler, Norbert Kaiser, Olaf Stenzel, Steffen Wilbrandt, Ralf Peter Brinkmann, Benjamin Schröder, Robert Storch, Tim Styrnoll

DPG Frühjahrstagung, 25.02.-01.03 2013, Friedrich-Schiller-Universität, Jena (talk) [DPG-Verhandlungen]

Ion energy distribution functions at the inner surface of a PET bottle in a microwave driven low pressure plasma

2012 - Daniel Szeremley, Mohammed Shihab, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner

Microwave Workshop 2012, Bochum, Germany, 26.11. - 28.11.2012, oral contribution

Ion energy distribution functions at the inner surface of a PET bottle

2012 - Daniel Szeremley, Mohammed Shihab, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner

WELT­PP-15 , Kerk­ra­de, The Nether­lands, 22.-23. November 2012, oral contribution

The Multipole Resonance Probe: Investigation of an Active Plasma Resonance Probe Using 3D-electromagnetic Field Simulations

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

42nd European Microwave Week, pp. 566-569 Amsterdam, The Netherlands, Oct 28 – Nov 2, 2012 [IEEE-Library]

Analytical Model for the Microwave Driven Double ICP Plasma Jet

2012 - Ali Arshadi, Denis Eremin, Ralf Peter Brinkmann, Peter Awakowicz, Horia-Eugen Porteanu, Roland Gesche, Klaus Wandel

65th Annual Gaseous Electronics Conference, October 22–26, 2012; Austin, Texas

Calculation of ion energy distribution functions at the inner surface of a PET bottle during sterilization processes

2012 - Daniel Szeremley, Simon Steves, Ralf Peter Brinkmann, Peter Awakowicz, Mark J. Kushner

65th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Aus­tin (Texas), USA, 22-26 Oc­to­ber, oral contribution

The Multiple Resonance Probe: A Novel Device for Industry Compatible Plasma Diagnostics

2012 - Ralf Peter Brinkmann, Robert Storch, Martin Lapke, Jens Oberrath, Christian Schulz, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Thomas Musch, Ilona Rolfes

65th Annual Gaseous Electronics Conference 2012 , Vol. 57, No. 8 , Austin, Texas, USA, Oct 22–26, 2012

Characterization of Dielectric Deposition Processes Using Active Plasma Resonance Spectroscopy

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

Kleinheubacher Tagung 2012, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 24-26, 2012

A Novel Radio-Frequency Plasma Probe for Monitoring Systems in Dielectric Deposition Processes

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

International Conference on Electromagnetics in Advanced Applications (ICEAA '12), pp. 728-731, DOI: 10.1109/ICEAA.2012.6328725, Cape Town, South Africa, Sep 2-7, 2012 [IEEE-Library]

Calculation of ion energy distribution functions at the inner surface of a PET bottle during sterilization processes

2012 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner

Dok­tor­an­den­kol­lo­qui­um 2012,IGK im Rahmen des SFB-TR 87, Bochum, Germany, 03 Au­gust, oral cont­ri­bu­ti­on

Global models for the microwave driven double icp plasma jet

2012 - Ali Arshadi, Denis Eremin, Ralf Peter Brinkmann, Peter Awakowicz, Horia-Eugen Porteanu, Roland Gesche, Klaus Wandel

39th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2012, Edin­burgh, Scott­land, Juli 08-12

Numerical Simulation of a Microwave Driven Low Pressure Plasma for PET Bottle Treatment

2012 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner

39th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2012, Edinburgh, Scottland, Juli 08-12

Prozesstaugliche Plasmadiagnostik auf Basis der Multipol-Resonanz-Sonde

2012 - Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Martin Lapke, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

16. GMA/ITG-Fachtagung Sensoren und Messsysteme 2012, Nürnberg, 22.-23. Mai (Proceedings: ISBN 978-3-9813484-0-8)

Prozessüberwachung und Kontrolle mit der Multipol-Resonanz-Sonde

2012 - Ralf Peter Brinkmann, Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Peter Awakowicz, Thomas Musch, Ilona Rolfes, Christian Zietz

DPG Früh­jahrs­ta­gung 2012, Stutt­gart, Ger­ma­ny, March 12-16

Numerische Simulation von kapazitiven Mehrfrequenzentladungen für Sputteranwendungen

2012 - Daniel Szeremley, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann

DPG Früh­jahrs­ta­gung 2012, Stuttgart, Ger­ma­ny, 12-16 March

Process Diagnostics and Monitoring Using the Multipole Resonance Probe (MRP)

2011 - Jens Harhausen, Peter Awakowicz, Ralf Peter Brinkmann, Rüdiger Foest, Martin Lapke, Thomas Musch, Jens Oberrath, Andreas Ohl, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll

64th Annual Gaseous Electronics Conference 2011, Salt Lake City, Utah, USA, Nov 14-18, 2011

Active Plasma Resonance Spectroscopy Using The Multipole Resonance Probe

2011 - Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

Kleinheubacher Tagung 2011, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 26-28, 2011

Usage of electromagnetic modeling of the multipole resonance probe

2011 - Martin Lapke, Christian Schulz, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

Proceedings of the 30th International Conference on Phenomena in Ionized Gases (ICPIG), Belfast, Northern Ireland, Aug 28 - Sep 2, 2011

Simulation and measurements of an inductively coupled hydrogen plasma for sterilization process

2011 - Max Engelhardt, Benjamin Denis, Tim Styrnoll, Peter Awakowicz

3. International Workshop on Radio Frequency Discharges, Dublin, Rep. of Ireland (2011)

Determination of effective UV/VUV radiation of a low pressure inductively coupled plasma for sterilization of spores

2011 - Benjamin Denis, Nikita Bibinov, Peter Awakowicz

20th International Symposium on Plasma Chemistry (ISPC), Philadelphia, USA (2011)

Simultane Bestimmung von Elektronendichte und Temperatur mit der Multipolresonanzsonde in technischen Plasmen

2011 - Martin Lapke, Tim Styrnoll, Jens Oberrath, Christian Schulz, Robert Storch, Ralf Peter Brinkmann, Peter Awakowicz, Thomas Musch, Ilona Rolfes

DPG Früh­jahrs­ta­gung 2011, Kiel, Germany, March 28-31, 2011

Bestimmung von Elektronendichte und Temperatur mit der Multipol-Resonaz-Sonde in Technologischen Plasmen

2011 - Tim Styrnoll, Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

PT 15, Stuttgart, Ger­ma­ny, Feb 28 - March 02, 2011

Funktionalanalytische Beschreibung der Multipol-Resonanz-Sonde

2011 - Jens Oberrath, Martin Lapke, Ralf Peter Brinkmann, Christian Schulz, Ilona Rolfes, Thomas Musch, Tim Styrnoll, Peter Awakowicz

PT 15, Stuttgart, Ger­ma­ny, Feb 28 - March 02, 2011

Simulation und Messungen einer doppelt induktiv gekoppelten Wasserstoffentladung zu Sterilisationszwecken

2011 - Max Engelhardt, Benjamin Denis, Tim Styrnoll, Nikita Bibinov, Peter Awakowicz

PT 15, Stuttgart, Ger­ma­ny, 28.02-02.03 2011,

Sterilisation und Proteinentfernung in einem induktiv gekoppelten Niederdruck-Plasma

2011 - Benjamin Denis, Max Engelhardt, Nikita Bibinov, Peter Awakowicz

PT 15, Stuttgart, Ger­ma­ny, 28.02-02.03 2011,

The Multipole Resonance Probe

2010 - Jens Oberrath, Martin Lapke, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

Section Days Research School, Nov 03-05, 2010
Page: