Publications

Robust high-gain control of nonlinear reactive sputter processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 1st IEEE Conference on Control Technology and Applications, pp. 25-30, Hawai'i, USA, 2017

Fine Structure of Ionisation Patterns and Confinement of Energetic Electrons in Asymmetric Capacitive Radio Frequency Discharges

2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Donkó, Zoltán

ICPIG 2017, Estoril/Lisbon, Portugal, July 9-14 [Poster_ICPIG]

Model reduction and identification of nonlinear reactive sputter processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 20th IFAC World Congress, pp. 14292-14298, Toulouse, France, 2017

Tuning Rule for Linear Control of Nonlinear Reactive Sputter Processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 21st International Conference on Process Control (PC), pp. 109-114, Štrbské Pleso, Slovakia, 2017

Effects of fast neutrals and energy-dependent secondary electron emission yield in PIC/MCC simulations of single- and dual-frequency CCPs

2017 - Aranka Derzsi, Ihor Korolov, Edmund Schüngel, Manaswi Daksha, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltán Donkó, Julian Schulze

invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017

Nonlinear Dynamics in Asymmetric and Symmetric Capacitivley Coupled Radio Frequency Discharges

2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó

invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017 [Abstract]

Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes

2017 - Malte Mallach, Moritz Oberberg, Peter Awakowicz, Thomas Musch

2017 IEEE MTT-S International Microwave Symposium (IMS), Honolulu, HI, USA, 2017, pp. 1022-1025. doi:10.1109/MWSYM.2017.8058765

From neutral particles to highly ionized plasmas: Heavy particle transport in technological sputtering systems

2017 - Jan Trieschmann, Stefan Ries, Dennis Krüger, Frederik Schmidt, Tobias Gergs, Nikita Bibinov, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann

18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017 (invited)

Efficient model for active control of radio frequency magnetron sputtering

2017 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann

18. Fach­ta­gung für Plas­ma­tech­no­lo­gie, Göt­tin­gen, Ger­ma­ny, Fe­bru­ary 20-22, 2017

Electron Heating in Voltage and Current Driven Asymmetric Capacitive RF Discharges

2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Donkó, Zoltán

21st Symposium on Application of Plasma Processes (SAPP) 13-18 January 2017, Štrbské Pleso, Slovakia

The effect of realistic surface coefficients on the electron dynamics and process control in simulations of capacitive RF plasmas

2016 - Daksha, Manaswi, Birk Berger, Julian Schulze, Derzsi, Aranka, Korolov, Ihor, Donkó, Zoltán, Sebastian Wilczek

69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.

Voltage vs. Current Driven CCRF Discharges: Differences in Electron and Ion Dynamics

2016 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Derzsi, Aranka, Hartmann, Peter, Donkó, Zoltán

69th Annual Gaseous Electronics Conference, Bochum, Germany, October 14, 2016. [GEC2016_Slides]

Global model for active control of capacitive radio frequency magnetron discharges

2016 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann

69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.

A self-consistent global model of surface wave discharges with cylindrical or co-axial structures: Ar or O2 fed with continuous or pulse-modulated power input

2016 - Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann

69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 14, 2016

Zero dimensional model of atmospheric SMD discharge and afterglow in humid air

2016 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann

69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 14, 2016

Collision Frequency Determination of Low-Pressure Plasmas based on RF-Reflectometry

2016 - Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

46th European Microwave Conference (EuMC), London, United Kingdom, Oct 4-6, 2016

Numerical simulations of a microwave driven low pressure plasma

2016 - Daniel Szeremley, Ralf Peter Brinkmann, Felix Mitschker, Simon Steves, Peter Awakowicz, Mark J. Kushner, Denis Eremin

43nd IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS), Banff, Kanada, June 19-23, 2016 (oral cont­ri­bu­ti­on)

Hysteresis Effects and Confinement of Beam Electrons in Capacitive Discharges

2016 - Sebastian Wilczek, Jan Trieschmann, Ralf Peter Brinkmann, Julian Schulze, Schüngel, Edmund, Derzsi, Aranka, Korolov, Ihor, Hartmann, Peter, Donkó, Zoltán

ICOPS 2016, Banff, Alberta, Canada, June 19-23 2016 (invited)

Zero dimensional model atmospheric SMD discharge and afterglow in humid air

2016 - Ryan T Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann

ICOPS 2016, Banff, Alberta, Canada, June 19-23 2016

Influence of Ion Energy and Ion-to-Growth Flux Ratio on PVD Coatings in a Multi-Frequency Capacitively Coupled Plasma

2016 - Stefan Ries, Dario Grochla, Jan Trieschmann, Denis Eremin, Carles Corbella, Alfred Ludwig, Achim von Keudell, Peter Awakowicz

42nd International Conference on Metallurgical Coatings and Thin Films, San Diego (California), USA, 27. April 2016.
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