A global model of a dual frequency capacitive discharge considering the nonlinearity of the sheath and a bulk-chemestry

2007 - Philipp Mertmann, Ralf Peter Brinkmann, Peter Awakowicz

60th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Ar­ling­ton (Vir­gi­nia), USA, 02-05 Oc­to­ber

High Frequency behaviour of dual frequency capacitively coupled plasmas

2007 - Egmont Semmler, Peter Awakowicz, Dennis Ziegler, Ralf Peter Brinkmann

28th Int. Con­fe­rence on Phe­no­me­na in Io­ni­zed Gases ICPIG, Pra­gue, Czech Re­pu­blic, 15-20 Juli