Publications
Planar Lab-On-A-Chip Micro Mass Spectrometer with Time-of-Flight Separation
2021 - Stephan Westerdick, Bent Walther, Patrick Hermanns, Florian Fricke, Thomas Musch
34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Virtual Conference, January 25-29, 2021.Plasma and Charged Particle Interaction with the Surfaces of a MEMS-Device, Micro-Mass Spectrometer
2020 - Patrick Hermanns, Stephan Westerdick, Simon Böddeker, Peter Awakowicz
47th IEEE International Conference on Plasma Science, Singapore, December 6-10, 2020.Basic research of electron dynamics in low pressure capacitively coupled plasmas
2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring
2020 - Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Zoltán Donkó, Aranka Derzsi, Peter Hartmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020Electrostatic wave propagation in the presence of secondary electrons in low pressure capacitively coupled plasmas
2020 - Katharina Nösges, Julian Schulze, Máté Vass, Zoltán Donkó, Peter Hartmann, Ralf Peter Brinkmann, Sebastian Wilczek
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020The difference between electron heating and power absorption in capacitively coupled plasmas
2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles
2020 - Dennis Pohle, Felix Mitschker, Jonathan Jenderny, Marcel Rudolph, Christian Schulz, Peter Awakowicz, Ilona Rolfes
European Microwave Conference 2020 (EuMC), DOI: 10.23919/EuMC48046.2021.9338200, Utrecht, Netherlands, 2020 [IEEE Library]A potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal
2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze
72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, TexasSpatio-temporal analysis of electron power absorption in low pressure CCPs operated in O2
2019 - Máté Vass, Sebastian Wilczek, Julian Schulze, Trevor Lafleur, Zoltán Donkó, Ralf Peter Brinkmann
72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, TexasThe Influence of gamma- and delta-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas
2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek
72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, TexasNear Cathode Modeling of a Hollow Cathode Arc in an Axial Magnetic Field
2019 - Liang Xu, Jens-Peter Heinß, Ilija Stefanovic, Denis Eremin, Fred Fietzke, Peter Awakowicz, Ralf Peter Brinkmann
5th WOPMAS, 5th-6th December, 2019, Bochum, GermanyHysteresis and E-mode to H-mode transition in a MEMS-device, low-pressure, microwave-driven microplasma
2019 - Patrick Hermanns, Stephan Westerdick, Simon Böddeker, Peter Awakowicz
Annual Gaseous Electronics Conference 2019, College Station, Texas, USA, October 28 - November 1, 2019.Untersuchung des Einflusses von Fertigungstoleranzen auf das Messverhalten der Multipol-Resonanz-Sonde
2019 - Dennis Pohle, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
Kleinheubacher Tagung 2019, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 23-25, 2019Minimally Invasive Supervision of Plasma-assisted Dielectric Deposition Processes
2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2019), pp. 163-165, DOI: 10.1109/IMWS-AMP.2019.8880124, Bochum, Germany, July 16-18, 2019 [IEEE Library]Nichtlokale und nichtlineare Elektronendynamik in kapazitiv gekoppelten Hochfrequenzentladungen
2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó
19. Fachtagung für Plasmatechnologie PT19, Cottbus, Deutschland, Juni 17-19, 2019.Nonlinear Electron Power Absorption in Capacitively Coupled Radio Frequency Discharges
2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Zoltán Donkó
2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.Power Gain and Loss Dynamics of γ- and δ- electrons in Low Pressure CCRF Discharges
2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek
9th bi-annual Radio Frequency Workshop, Dublin, Ireland, June 24-25 2019Theoretical investigation of the magnetic asymmetry effect by using a lumped element model
2019 - Dennis Engel, Moritz Oberberg, Birk Berger, Laura Kroll, Julian Schulze, Peter Awakowicz, Ralf Peter Brinkmann
2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.Kinetic interpretation of a magnetically enhanced hollow cathode arc discharge
2019 - Liang Xu, Jens-Peter Heinß, Ilija Stefanovic, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann
13th Frontiers in Low-Temperature Plasma Diagnostics & 1st Frontiers in Low-Temperature Plasma Simulations, 13th -16th May, 2019, Bad Honnef, GermanyMonitoring of Industrial Plasma Processes Using the Multipole Resonance Probe
2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
European Microwave Conference in Central Europe (EuMCE), pp. pp. 622-625, Prague, Czech Republic, May 13-15, 2019 [IEEE Library]High Frequency Plasma Enhancement of a Conventional Spark Ignition System to Extend the Operating Range of a Modern Mass-Production Engine
2018 - Kevin Stark, Sven Gröger, Marcel van Delden, Gordon Notzon, Wolfgang Eifler, Thomas Musch, Peter Awakowicz
4th International Conference on Ignition Systems for Gasoline Engines, Berlin, Germany, Dec. 2018.Nonlocal and nonlinear dynamics in low pressure capacitively coupled radio frequency discharges
2018 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Donkó, Zoltán
71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation GEC 2018
2018 - Julian Schulze, Zoltán Donkó, Trevor Lafleur, Sebastian Wilczek, Ralf Peter Brinkmann
71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.The effects of secondary electrons on the discharge characteristics and control of particle properties in low-pressure capacitively coupled plasmas
2018 - Aranka Derzsi, Benedek Horvath, Katharina Nösges, Sebastian Wilczek, Zoltán Donkó, Julian Schulze
71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.On understanding of a magnetically enhanced hollow cathode arc plasma
2018 - Liang Xu, Jens-Peter Heinß, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann
71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring
2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Michael Friedrichs, Alexandra Serwa, Peter Uhlig, Jens Oberrath, Peter Awakowicz, Ilona Rolfes
30th Asia-Pacific Microwave Conference (APMC), pp. 1315-1317, DOI: 10.23919/APMC.2018.8617552, Kyoto, Japan, November 06–09, 2018 [IEEE Library]Eine temperaturbeständige Sonde für die Plasmadiagnostik in LTCC
2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz
IMAPS-Herbstkonferenz 2018, München, Deutschland, October 18–19, 2018Progression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology
2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes
48th European Microwave Conference (EuMC), pp.239-242, DOI: 10.23919/EuMC.2018.8541730, Madrid, Spain, Sep 23-27, 2018 [IEEE Library]Properties and surface interaction of a low pressure microwave microplasma as an electron source for a MEMS device miniature mass spectrometer
2018 - Patrick Hermanns, Stephan Westerdick, Simon Böddeker, Peter Awakowicz
International Conference on Plasma Surface Engineering 2018, Garmisch-Partenkirchen, Germany, September 17–21, 2018.Exchangeable Miniaturized Mass Spectrometer Chip Based on Silicon Structures
2018 - Stephan Westerdick, Patrick Hermanns, Benedikt Janßen, Thomas Musch
Eurosensor 2018, Graz, Austria, September 9-12, 2018. DOI: 10.3390/proceedings2131071A Temperature Stable Probe for Plasma Diagnostics in LTCC
2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz
IMAPS/ACerS 14th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2018), Aveiro, Portugal, April 18–20, 2018An Advanced High-temperature Stable Multipole Resonance Probe for Industry Compatible Plasma Diagnostics
2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes
German Microwave Conference (GeMiC 2018), pp. 235-238, doi: 10.23919/GEMIC.2018.8335073, Freiburg, Germany, March 12–14, 2018 [IEEE Library]The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes
2018 - Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz
DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018Neural network based linearization and control of sputter processes
2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze
Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017Control-oriented modeling and stabilization of reactive sputter processes
2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze
16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas
2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltan Donko
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen
2017 - Efe Kemaneci, Ralf Peter Brinkmann, Felix Mitschker, Peter Awakowicz
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017Comparison of Zero Dimensional Plasma Chemistry Model with Ozone Absorption Spectroscopy Measurements
2017 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Friederike Kogelheide, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Katharina Stapelmann
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017Differences Between Cartesian and Spherical 1d3v Particle-in-Cell Simulations
2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltan Donko
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 7, 2017Sputtering process data interpreted by heavy particle simulations
2017 - Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider
Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017The application of the multipole resonance probe to industrially relevant processes
2017 - Moritz Oberberg, Marcel Fiebrandt, Stefan Ries, Christian Wölfel, Peter Awakowicz
70th Annual Gaseous Electronics Conference, Pittsburgh, USA, 2017The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges
2017 - Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltan Donko, Julian Schulze
Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017Model identification of nonlinear sputter processes
2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze
C. Wölfel, S. Kockmann, P. Awakowicz, J. Lunze: Model identification of nonlinear sputter processes Proc. of the 17th International Conference on Control, Automation and Systems, pp. 182-187, Jeju, Korea, 2017.Realisierung einer temperaturstabilen Multipol -Resonanz -Sonde in LTCC -Technologie für die Plasmadiagnostik
2017 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Uhlig, Alexandra Serwa, Peter Awakowicz, Ilona Rolfes
Kleinheubacher Tagung 2017, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 25-27, 2017Ein Ansatz zur Modellierung und Regelung reaktiver Zerstäubungsprozesse
2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze
GMA-FA 1.30 Modellbildung, Identifikation und Simulation in der Automatisierungstechnik, Anif, 2017Influence of the electron extraction voltage on plasma parameters in a low pressure microwave driven microplasma as an electron source for a miniaturized mass spectrometer
2017 - Patrick Hermanns, Stephan Westerdick, Simon Böddeker, Peter Awakowicz
1st Asia Pacific Conference on Plasma Physics 2017, Chengdu, China, September 18-23, 2017.Robust high-gain control of nonlinear reactive sputter processes
2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze
Proc. of the 1st IEEE Conference on Control Technology and Applications, pp. 25-30, Hawai'i, USA, 2017Fine Structure of Ionisation Patterns and Confinement of Energetic Electrons in Asymmetric Capacitive Radio Frequency Discharges
2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Donkó, Zoltán
ICPIG 2017, Estoril/Lisbon, Portugal, July 9-14 [Poster_ICPIG]Model reduction and identification of nonlinear reactive sputter processes
2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze
Proc. of the 20th IFAC World Congress, pp. 14292-14298, Toulouse, France, 2017Tuning Rule for Linear Control of Nonlinear Reactive Sputter Processes
2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze
Proc. of the 21st International Conference on Process Control (PC), pp. 109-114, Štrbské Pleso, Slovakia, 2017Effects of fast neutrals and energy-dependent secondary electron emission yield in PIC/MCC simulations of single- and dual-frequency CCPs
2017 - Aranka Derzsi, Ihor Korolov, Edmund Schüngel, Manaswi Daksha, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltán Donkó, Julian Schulze
invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017Nonlinear Dynamics in Asymmetric and Symmetric Capacitivley Coupled Radio Frequency Discharges
2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó
invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017 [Abstract]Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes
2017 - Malte Mallach, Moritz Oberberg, Peter Awakowicz, Thomas Musch
2017 IEEE MTT-S International Microwave Symposium (IMS), Honolulu, HI, USA, 2017, pp. 1022-1025. doi:10.1109/MWSYM.2017.8058765From neutral particles to highly ionized plasmas: Heavy particle transport in technological sputtering systems
2017 - Jan Trieschmann, Stefan Ries, Dennis Krüger, Frederik Schmidt, Tobias Gergs, Nikita Bibinov, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann
18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017 (invited)Efficient model for active control of radio frequency magnetron sputtering
2017 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann
18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017Electron Heating in Voltage and Current Driven Asymmetric Capacitive RF Discharges
2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Donkó, Zoltán
21st Symposium on Application of Plasma Processes (SAPP) 13-18 January 2017, Štrbské Pleso, SlovakiaThe effect of realistic surface coefficients on the electron dynamics and process control in simulations of capacitive RF plasmas
2016 - Daksha, Manaswi, Birk Berger, Julian Schulze, Derzsi, Aranka, Korolov, Ihor, Donkó, Zoltán, Sebastian Wilczek
69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.Voltage vs. Current Driven CCRF Discharges: Differences in Electron and Ion Dynamics
2016 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Derzsi, Aranka, Hartmann, Peter, Donkó, Zoltán
69th Annual Gaseous Electronics Conference, Bochum, Germany, October 14, 2016. [GEC2016_Slides]Global model for active control of capacitive radio frequency magnetron discharges
2016 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann
69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.A self-consistent global model of surface wave discharges with cylindrical or co-axial structures: Ar or O2 fed with continuous or pulse-modulated power input
2016 - Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann
69th Annual Gaseous Electronics Conference, Bochum, Germany, October 14, 2016Zero dimensional model of atmospheric SMD discharge and afterglow in humid air
2016 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann
69th Annual Gaseous Electronics Conference, Bochum, Germany, October 14, 2016Collision Frequency Determination of Low-Pressure Plasmas based on RF-Reflectometry
2016 - Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
46th European Microwave Conference (EuMC), London, United Kingdom, Oct 4-6, 2016Numerical simulations of a microwave driven low pressure plasma
2016 - Daniel Szeremley, Ralf Peter Brinkmann, Felix Mitschker, Simon Steves, Peter Awakowicz, Mark J. Kushner, Denis Eremin
43nd IEEE International Conference on Plasma Science (ICOPS), Banff, Kanada, June 19-23, 2016 (oral contribution)Hysteresis Effects and Confinement of Beam Electrons in Capacitive Discharges
2016 - Sebastian Wilczek, Jan Trieschmann, Ralf Peter Brinkmann, Julian Schulze, Schüngel, Edmund, Derzsi, Aranka, Korolov, Ihor, Hartmann, Peter, Donkó, Zoltán
ICOPS 2016, Banff, Alberta, Canada, June 19-23 2016 (invited)Zero dimensional model atmospheric SMD discharge and afterglow in humid air
2016 - Ryan T Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann
ICOPS 2016, Banff, Alberta, Canada, June 19-23 2016Influence of Ion Energy and Ion-to-Growth Flux Ratio on PVD Coatings in a Multi-Frequency Capacitively Coupled Plasma
2016 - Stefan Ries, Dario Grochla, Jan Trieschmann, Denis Eremin, Carles Corbella, Alfred Ludwig, Achim von Keudell, Peter Awakowicz
42nd International Conference on Metallurgical Coatings and Thin Films, San Diego (California), USA, 27. April 2016.Monitoring of Low Pressure Plasmas with a Calibrated Probe
2016 - Jan Niclas Runkel, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes
German Microwave Conference (GeMiC 2016), pp. 43-46, doi: 10.1109/GEMIC.2016.7461551, Bochum, Germany, March 14-16, 2016 [IEEE Library]Monitoring of Low Pressure Plasmas with a Calibrated Probe
2016 - Jan Niclas Runkel, Christian Schulz, Ilona Rolfes, Moritz Oberberg, Peter Awakowicz
2016 GERMAN MICROWAVE CONFERENCE (GEMIC) Book Series: German Microwave Conference Pages: 43-46 Published: 2016Control orientated modeling and analysis of a reactive (O2) sputter (Ti) process
2015 - Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz
WELTPP-18, Kerkrade, 2015Ion Energy Distribution Functions in a Microwave Driven Plasma Discharge
2015 - Daniel Szeremley, Felix Mitschker, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing, Honolulu, USA, October 12-15 2015 (oral contribution)Nutzung von Plasmadiagnostik zur Regelung eines reaktiven Sputterprozesses
2015 - Christian Wölfel, Moritz Oberberg, Dennis Krüger, Jan Lunze, Ralf Peter Brinkmann, Peter Awakowicz
23. Dresdner Vakuumtechnische Kolloquium (NDVaK) Beschichtung und Modifizierung von Kunststoffoberflächen, Dresden, 2015Nonlinear Electron Resonance Heating in Capacitive Discharges
2015 - Sebastian Wilczek, Jan Trieschmann, Denis Eremin, Ralf Peter Brinkmann, Julian Schulze, Derzsi, Aranka, Korolov, Ihor, Hartmann, Peter, Donkó, Zoltán
NCPST 5th Radio Frequency Discharges Workshop 2015, Dublin, Ireland, June 22-23 2015Kinetische Simulation der Dynamik gesputterten Aluminiums in kapazitiv gekoppelten Mehrfrequenzplasmen
2015 - Jan Trieschmann, Stefan Ries, Stefan Bienholz, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann
DPG Frühjahrstagung 2015, Bochum, Germany, 2-5 MarchSupervision and Control of Medical Sterilization Processes Utilizing the Multipole Resonance Probe
2013 - Christian Schulz, Tim Styrnoll, Peter Awakowicz, Ilona Rolfes
IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO 2013), pp. 1-3, DOI: 10.1109/IMWS-BIO.2013.6756158, Singapore, Dec 9 – 11, 2013 [IEEE-Library]The importance of Ion energy distribution functions at the inner surface of a PET bottle
2013 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann, Mark J. Kushner
WELTPP-16, Kerkrade, The Netherlands, 21-22 NovemberThe Multipole Resonance Probe: Evolution of a Plasma Sensor
2013 - Christian Schulz, Tim Styrnoll, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
IEEE Sensors, pp. 1-4, DOI: 10.1109/ICSENS.2013.6688324, Baltimore, Maryland, USA, Nov 3–6, 2013 [IEEE-Library]Kinetic simulation of neutral particle transport in sputtering processes
2013 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz
66th Annual Gaseous Electronics Conference (GEC), Princeton (New Jersey), USA, 30 September - 04 OctoberKinetic Simulations of a Large-Sized Multifrequency CCP-Based Sputtering Source with a PIC/MCC Darwin Code
2013 - Denis Eremin, Stefan Bienholz, Daniel Szeremley, Torben Hemke, Peter Awakowicz, Ralf Peter Brinkmann
40th IEEE International Conference on Plasma Science (ICOPS) & Pulsed Power and Plasma Science (PPPS) 2013, San Francisco (California), USA, 17-21 JuneAnalyse der Ausbreitung von Mikrowellen in einem Plasma
2013 - Daniel Szeremley, Ralf Peter Brinkmann, Simon Steves, Peter Awakowicz, Mark J. Kushner
DPG Frühjahrstagung 2013, Jena, Germany, 25 February - 01 March, oral contributionSimulationen zur Gasdynamik in Sputterprozessen
2013 - Jan Trieschmann, Ralf Peter Brinkmann, Stefan Bienholz, Peter Awakowicz, Ricardo Henrique Brugnara, Nazlim Bagcivan, Kirsten Bobzin
DPG Frühjahrstagung 2013, Jena, Germany, 25 February - 01 MarchDiagnostik und Steuerung von PIAD-Prozessen
2013 - Jens Harhausen, Rüdiger Foest, Andreas Ohl, Dieter Gäbler, Norbert Kaiser, Olaf Stenzel, Steffen Wilbrandt, Ralf Peter Brinkmann, Benjamin Schröder, Robert Storch, Tim Styrnoll
DPG Frühjahrstagung, 25.02.-01.03 2013, Friedrich-Schiller-Universität, Jena (talk) [DPG-Verhandlungen]Ion energy distribution functions at the inner surface of a PET bottle in a microwave driven low pressure plasma
2012 - Daniel Szeremley, Mohammed Shihab, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner
Microwave Workshop 2012, Bochum, Germany, 26.11. - 28.11.2012, oral contributionIon energy distribution functions at the inner surface of a PET bottle
2012 - Daniel Szeremley, Mohammed Shihab, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner
WELTPP-15 , Kerkrade, The Netherlands, 22.-23. November 2012, oral contributionThe Multipole Resonance Probe: Investigation of an Active Plasma Resonance Probe Using 3D-electromagnetic Field Simulations
2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
42nd European Microwave Week, pp. 566-569 Amsterdam, The Netherlands, Oct 28 – Nov 2, 2012 [IEEE-Library]Analytical Model for the Microwave Driven Double ICP Plasma Jet
2012 - Ali Arshadi, Denis Eremin, Ralf Peter Brinkmann, Peter Awakowicz, Horia-Eugen Porteanu, Roland Gesche, Klaus Wandel
65th Annual Gaseous Electronics Conference, October 22–26, 2012; Austin, TexasCalculation of ion energy distribution functions at the inner surface of a PET bottle during sterilization processes
2012 - Daniel Szeremley, Simon Steves, Ralf Peter Brinkmann, Peter Awakowicz, Mark J. Kushner
65th Annual Gaseous Electronics Conference (GEC), Austin (Texas), USA, 22-26 October, oral contributionThe Multiple Resonance Probe: A Novel Device for Industry Compatible Plasma Diagnostics
2012 - Ralf Peter Brinkmann, Robert Storch, Martin Lapke, Jens Oberrath, Christian Schulz, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Thomas Musch, Ilona Rolfes
65th Annual Gaseous Electronics Conference 2012 , Vol. 57, No. 8 , Austin, Texas, USA, Oct 22–26, 2012Characterization of Dielectric Deposition Processes Using Active Plasma Resonance Spectroscopy
2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
Kleinheubacher Tagung 2012, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 24-26, 2012A Novel Radio-Frequency Plasma Probe for Monitoring Systems in Dielectric Deposition Processes
2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
International Conference on Electromagnetics in Advanced Applications (ICEAA '12), pp. 728-731, DOI: 10.1109/ICEAA.2012.6328725, Cape Town, South Africa, Sep 2-7, 2012 [IEEE-Library]Calculation of ion energy distribution functions at the inner surface of a PET bottle during sterilization processes
2012 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner
Doktorandenkolloquium 2012,IGK im Rahmen des SFB-TR 87, Bochum, Germany, 03 August, oral contributionGlobal models for the microwave driven double icp plasma jet
2012 - Ali Arshadi, Denis Eremin, Ralf Peter Brinkmann, Peter Awakowicz, Horia-Eugen Porteanu, Roland Gesche, Klaus Wandel
39th IEEE International Conference on Plasma Science 2012, Edinburgh, Scottland, Juli 08-12Numerical Simulation of a Microwave Driven Low Pressure Plasma for PET Bottle Treatment
2012 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner
39th IEEE International Conference on Plasma Science 2012, Edinburgh, Scottland, Juli 08-12Prozesstaugliche Plasmadiagnostik auf Basis der Multipol-Resonanz-Sonde
2012 - Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Martin Lapke, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
16. GMA/ITG-Fachtagung Sensoren und Messsysteme 2012, Nürnberg, 22.-23. Mai (Proceedings: ISBN 978-3-9813484-0-8)Prozessüberwachung und Kontrolle mit der Multipol-Resonanz-Sonde
2012 - Ralf Peter Brinkmann, Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Peter Awakowicz, Thomas Musch, Ilona Rolfes, Christian Zietz
DPG Frühjahrstagung 2012, Stuttgart, Germany, March 12-16Numerische Simulation von kapazitiven Mehrfrequenzentladungen für Sputteranwendungen
2012 - Daniel Szeremley, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann
DPG Frühjahrstagung 2012, Stuttgart, Germany, 12-16 MarchProcess Diagnostics and Monitoring Using the Multipole Resonance Probe (MRP)
2011 - Jens Harhausen, Peter Awakowicz, Ralf Peter Brinkmann, Rüdiger Foest, Martin Lapke, Thomas Musch, Jens Oberrath, Andreas Ohl, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll
64th Annual Gaseous Electronics Conference 2011, Salt Lake City, Utah, USA, Nov 14-18, 2011Active Plasma Resonance Spectroscopy Using The Multipole Resonance Probe
2011 - Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
Kleinheubacher Tagung 2011, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 26-28, 2011Usage of electromagnetic modeling of the multipole resonance probe
2011 - Martin Lapke, Christian Schulz, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
Proceedings of the 30th International Conference on Phenomena in Ionized Gases (ICPIG), Belfast, Northern Ireland, Aug 28 - Sep 2, 2011Simulation and measurements of an inductively coupled hydrogen plasma for sterilization process
2011 - Max Engelhardt, Benjamin Denis, Tim Styrnoll, Peter Awakowicz
3. International Workshop on Radio Frequency Discharges, Dublin, Rep. of Ireland (2011)Determination of effective UV/VUV radiation of a low pressure inductively coupled plasma for sterilization of spores
2011 - Benjamin Denis, Nikita Bibinov, Peter Awakowicz
20th International Symposium on Plasma Chemistry (ISPC), Philadelphia, USA (2011)Simultane Bestimmung von Elektronendichte und Temperatur mit der Multipolresonanzsonde in technischen Plasmen
2011 - Martin Lapke, Tim Styrnoll, Jens Oberrath, Christian Schulz, Robert Storch, Ralf Peter Brinkmann, Peter Awakowicz, Thomas Musch, Ilona Rolfes
DPG Frühjahrstagung 2011, Kiel, Germany, March 28-31, 2011Bestimmung von Elektronendichte und Temperatur mit der Multipol-Resonaz-Sonde in Technologischen Plasmen
2011 - Tim Styrnoll, Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
PT 15, Stuttgart, Germany, Feb 28 - March 02, 2011Funktionalanalytische Beschreibung der Multipol-Resonanz-Sonde
2011 - Jens Oberrath, Martin Lapke, Ralf Peter Brinkmann, Christian Schulz, Ilona Rolfes, Thomas Musch, Tim Styrnoll, Peter Awakowicz
PT 15, Stuttgart, Germany, Feb 28 - March 02, 2011Simulation und Messungen einer doppelt induktiv gekoppelten Wasserstoffentladung zu Sterilisationszwecken
2011 - Max Engelhardt, Benjamin Denis, Tim Styrnoll, Nikita Bibinov, Peter Awakowicz
PT 15, Stuttgart, Germany, 28.02-02.03 2011,Sterilisation und Proteinentfernung in einem induktiv gekoppelten Niederdruck-Plasma
2011 - Benjamin Denis, Max Engelhardt, Nikita Bibinov, Peter Awakowicz
PT 15, Stuttgart, Germany, 28.02-02.03 2011,The Multipole Resonance Probe
2010 - Jens Oberrath, Martin Lapke, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
Section Days Research School, Nov 03-05, 2010The multipole resonance probe: Realization of an optimized radio-frequency plasma probe based on active plasma resonance spectroscopy
2010 - Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
1st Middle East Conference on Antennas and Propagation (MECAP 2010), pp. 1-5, DOI: 10.1109/MECAP.2010.5724175, Cairo, Egypt, Oct 20-22, 2010 [IEEE-Library]Darwin particle-in-cell code simulations of dual frequency capacitively coupled discharges on graphical processing units
2010 - Denis Eremin, Philipp Mertmann, Markus Gebhardt, Ralf Peter Brinkmann
63rd Annual Gaseous Electronics Conference 2010, Paris, France, 04-08 OctoberElectron density measurements in technological plasmas using the Multipole Resonance Probe
2010 - Tim Styrnoll, Martin Lapke, Christian Schulz, Robert Storch, Jens Oberrath, Thomas Musch, Ilona Rolfes, Peter Awakowicz, Ralf Peter Brinkmann
63rd Annual Gaseous Electronics Conference 2010, Paris, France, October 4-8, 2010Particle in cell simulation of CCPs using graphics processing units
2010 - Philipp Mertmann, Denis Eremin, Peter Awakowicz
63rd Annual Gaseous Electronics Conference 2010, Paris, France, 04-08 OctoberPIC simulations of low pressure plasmas using graphics processing units
2010 - Philipp Mertmann, Denis Eremin, Peter Awakowicz
63rd Gaseous Electronics Conference 2010, Paris, France, October 04-08Radio-Frequency Plasma Diagnostics with the Multipole Resonance Probe
2010 - Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes
Kleinheubacher Tagung 2010, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Oct 4-6, 2010Simulation of a inductively coupled hydrogen plasma for sterilization processes
2010 - Max Engelhardt, Benjamin Denis, Peter Awakowicz
63rd Annual Gaseous Electronics Conference 2010, Paris, France, 04-08 OctoberThe Multipole Resonance Probe: A new concept of plasma resonance spectroscopy
2010 - Lapke, Martin, Jens Oberrath, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann
Doktoranden Workshop 2010, FOR 1123 and SFB/TR 87, 9-10 AugustModeling and simulation of multifrequency capacitive discharges
2010 - Stefan Bienholz, Philipp Mertmann, Peter Awakowicz, Ralf Peter Brinkmann
WELTPP-11 Kerkrade,The Netherlands (2008)Prozesstaugliche Plasmadiagnostik mit der Multipolresonanzsonde
2010 - Ralf Peter Brinkmann, Peter Awakowicz, Martin Lapke, Thomas Musch, Jens Oberrath, Ilona Rolfes, Robert Storch, Tim Styrnoll, Thomas Zelder, Christian Zietz
Symposium Plasmatechnik für die Optikherstellung (SYPT), DPG Frühjahrstagung, oral contribution, Hannover, Germany, March 8-12, 2010Atmospheric DBD in air for biomedical application: From excitation emission to simulation of irradiation
2010 - Priyadarshini Rajasekaran, Philipp Mertmann, Nikita Bibinov, D. Wandke, W. Vioel, Peter Awakowicz
International Workshop on Diagnostics in Microplasmas March 2010 (Bochum)Construction and Characterization of Microplasma Jet for Thin Film Deposition on Capillary
2010 - Ramasamy Pothiraja, Nikita Bibinov, Peter Awakowicz
International Workshop on Diagnostics in Microplasmas March 2010 (Bochum)Simulation of chemical reactions of an atmospheric pressure dielectric barrier discharge using graphics processing units
2009 - Philipp Mertmann, Priyadarshini Rajasekaran, Nikita Bibinov, Peter Awakowicz, Markus Gebhardt
WELTPP-12, Kerkrade, The Netherlands, November 26-27Particle- In-Cell simulations of high pressure plasmas using graphics processing units
2009 - Markus Gebhardt, Frank Atteln, Ralf Peter Brinkmann, Philipp Mertmann, Peter Awakowicz
62th Annual Gaseous Electronics Conference, Saratoga Springs (New York), USA, 20-23 October, oral contributionCharacterization of a new VHF-CCP for Sterilization
2009 - Katharina Stapelmann, Nikita Bibinov, J. Wunderlich, Peter Awakowicz
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYInvestigation of Ce-emitters in high intensity discharge lamps
2009 - Cornelia Ruhrmann, Michael Westermeier, J. Reinelt, Peter Awakowicz, Jürgen Mentel
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYModeling and simulation of emitter effects at cathodes in high intensity discharge lamps
2009 - Andre Bergner, Frank Holger Scharf, Jürgen Mentel
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYOptical absorption spectroscopy with an UHP-lightsource - an effective diagnostic method for Dy- and Ce-emitters in high intensity discharge lamps
2009 - Michael Westermeier, Cornelia Ruhrmann, J. Reinelt, Peter Awakowicz, Jürgen Mentel
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYParticle-In-Cell simulations of high pressure plasmas using graphics processing units
2009 - M. Gebhardt, F. Atteln, R. P. Brinkmann, Philipp Mertmann, Peter Awakowicz
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYPermeation barrier coating and plasma sterilization of PET bottles and foils
2009 - Simon Steves, M. Deilmann, Nikita Bibinov, Peter Awakowicz
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYSilicon oxide permeation barrier coating of PET bottles and foils
2009 - Simon Steves, M. Deilmann, Peter Awakowicz
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYSimulation of Chemical Reactions of an Atmospheric Pressure DBD using Graphics Processing Unit
2009 - Philipp Mertmann, Priyadarshini Rajasekaran, Nikita Bibinov, Peter Awakowicz, M. Gebhardt
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYSputter processes in capacitively coupled multi frequency discharges
2009 - Stefan Bienholz, Egmont Semmler, Peter Awakowicz
62nd Annual Gaseous Electronics Conference, Saratoga Springs, NYCharacterization of Dielectric Barrier Discharge in air for biomedical application
2009 - Priyadarshini Rajasekaran, Nikita Bibinov, D. Wandke, W. Vioel, Peter Awakowicz
Proceedings ISPC 19, Bochum, 2009, 522Development and characterization of a new VHF-CCP for Sterilization
2009 - Katharina Stapelmann, Nikita Bibinov, Peter Awakowicz
Proceedings ISPC 19, Bochum, 2009, 549Interaction of plasmas and photons with human skin cells
2009 - M. Born, U. Niemann, Peter Awakowicz, Nikita Bibinov, C. Suschek, C. Oppländer, V. Kolb-Bachofen, J. Liebmann
Proceedings ISPC 19, Bochum, 2009, 104Investigation of the anodic and cathodic emitter-effect in high-intensity-discharge (HID) lamps
2009 - J. Reinelt, Michael Westermeier, Cornelia Ruhrmann, Tim Styrnoll, Jürgen Mentel, Peter Awakowicz
Proceedings ISPC 19, Bochum, 2009, 263Investigation on the sterilization mechanisms of medical surfaces in a double inductively coupled plasma
2009 - Benjamin Denis, H. Halfmann, Nikita Bibinov, J. Wunderlich, Peter Awakowicz
Proceedings ISPC 19, Bochum, 2009, 534Silicon oxide permeation barrier coating of PET bottles and foils deposited by hexamethyldisiloxan-oxygen plasmas
2009 - Simon Steves, M. Deilmann, Peter Awakowicz
Proceedings ISPC 19, Bochum, 2009, 227Absorption spectroscopy with an UHP-backlight system – an innovative and simple concept for particle density diagnostics in HID-lamps
2009 - Michael Westermeier, J. Reinelt, Cornelia Ruhrmann, Jürgen Mentel, Peter Awakowicz
Frontiers in Low Temperature Plasma Diagnostics 8Characterization of a low-pressure microwave plasma for sterilization of polyethylene terephthalate bottles using optical emission spectroscopy and Langmuir probe diagnostic
2009 - Marion Steven, M. Deilmann, Nikita Bibinov, Peter Awakowicz
Frontiers in Low Temperature Plasma Diagnostics 8Dielectric Barrier Discharge in air: Optimising for Biomedical Application
2009 - Priyadarshini Rajasekaran, Nikita Bibinov, D. Wandke, W. Vioel, Peter Awakowicz
Frontiers in Low Temperature Plasma Diagnostics 8Investigation on the sterilization mechanisms of a double inductively coupled plasma
2009 - Benjamin Denis, H. Halfmann, Nikita Bibinov, J. Wunderlich, Peter Awakowicz
Frontiers in Low Temperature Plasma Diagnostics 8Dielectric Barrier Discharge in air for human skin treatment
2009 - Priyadarshini Rajasekaran, Nikita Bibinov, Peter Awakowicz
2nd International Workshop on Plasma-Tissue Interactions, 2.- 4.02.2009, Leibniz Institute for Plasma Science and Technology (INP Greifswald), Greifswald (Germany)Influence of frequency and relative phase effects in dual frequency capacitive discharges on thin film deposition behavior
2009 - Egmont Semmler, Dennis Ziegler, D. O' Connel, Timo Gans, Peter Awakowicz, Achim von Keudell, Ralf Peter Brinkmann
2nd Workshop on Radio-Frequency Discharges, La Badine - Presquile de Giens, France (2009)Determination of Ba-emitter densities along electrodes in high pressure sodium lamps by optical absorption spectroscopy
2008 - Michael Westermeier, Jens Reinelt, Peter Awakowicz, Jürgen Mentel
61st Annual Gaseous Electronics Conference, Dallas, TexasDielectric Barrier Discharge for Biomedical application
2008 - Priyadarshini Rajasekaran, Nikita Bibinov, Peter Awakowicz
German-Japanese workshop (Bochum) Oct 2008Modeling of high-frequency driven discharges at medium and high pressure
2008 - Philipp Mertmann, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann
61st Annual Gaseous Electronics Conference, Dallas, TexasModelling and Simulation of multi-frequency capacitive discharges
2008 - Stefan Bienholz, Philipp Mertmann, Peter Awakowicz, Ralf Peter Brinkmann
61st Annual Gaseous Electronics Conference, Dallas, TexasPhase resolved investigation of the power balance of HID lamp electrodes from low to RF frequency operation
2008 - Jens Reinelt, Michael Westermeier, Jürgen Mentel, Peter Awakowicz
61st Annual Gaseous Electronics Conference, Dallas, TexasThe influence of double ionization on the arc attachment in high intensity discharge lamps
2008 - Frank Holger Scharf, Andre Bergner, Jürgen Mentel
61st Annual Gaseous Electronics Conference, Dallas, TexasAn Integrated Atmospheric Microwave Plasma Source
2008 - R. Kovacs, Nikita Bibinov, Peter Awakowicz, H.-E. Porteanu, S. Kühn, R. Gesche
Eleventh International Conference on Plasma Surface Engineering, PSE 2008Characterisation of DBD plasma in air by treatment of water and other surfaces
2008 - Priyadarshini Rajasekaran, Nikita Bibinov, Peter Awakowicz
Eleventh International Conference on Plasma Surface Engineering, PSE 2008Determination of fundamental sterilization mechanisms in low pressure discharges
2008 - H. Halfmann, Benjamin Denis, Nikita Bibinov, Peter Awakowicz
Eleventh International Conference on Plasma Surface Engineering, PSE 2008DIRECT CURRENT DISCHARGE FORMATION AND EXPANSION AT ATMOSPHERIC PRESSURE
2008 - D. Dudek, J. Engelmann, Peter Awakowicz
Eleventh International Conference on Plasma Surface Engineering, PSE 2008OES Analysis of a Large Scale HIPIMS/UBM Sputtering Process to Produce C-DLC Coatings
2008 - Nikita Bibinov, S. Kunkel, Peter Awakowicz, W.-D. Münz
Eleventh International Conference on Plasma Surface Engineering, PSE 2008Plasma and thin film growth control in dual frequency driven capacitive discharges
2008 - Egmont Semmler, D. O'Connell, T. Gans, A. Yüce, Peter Awakowicz, A. von Keudell
Eleventh International Conference on Plasma Surface Engineering, PSE 2008Silicon oxide permeation barrier coating and plasma sterilization of PET bottles and foils
2008 - M. Deilmann, H. Halfmann, Simon Steves, Nikita Bibinov, Peter Awakowicz
Eleventh International Conference on Plasma Surface Engineering, PSE 2008A double inductively coupled low-pressure plasma for sterilization of medical implant materials
2008 - Joerg Hauser, H. Halfmann, Peter Awakowicz, M. Koeller, S. Esenwein
BIOMEDIZINISCHE TECHNIK 53(4), volume 53, 199–203, 2008 [DOI]Determination of the electron energy distribution function in a low pressure DICP discharge used for plasma sterilization
2008 - Nikita Bibinov, H. Halfmann, Peter Awakowicz
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG), 15.-19.07.2008, Granada (Spain)Numerical investigation of different modes of arc attachment at tungsten cathodes in dependence on the electrode geometry
2008 - F. H. Scharf, M. Szelong, Jürgen Mentel
The 35 th. IEEE International Conference on Plasma Science, ICOPS 2008, 422, 2008Power balance of HID lamp electrodes under HF operation
2008 - Jens Reinelt, Michael Westermeier, Peter Awakowicz, Jürgen Mentel
2008 IEEE 35th International Conference on Plasma Science. Karlsruhe, Germany., June 2008The gas-phase emitter effect and the formation of an emitter-spot-attachment in ceramic metal halide lamps
2008 - Michael Westermeier, Oliver Langenscheidt, Jens Reinelt, Peter Awakowicz
2008 IEEE 35th International Conference on Plasma Science. Karlsruhe, Germany., June 2008Modeling of high-frequency driven discharges at medium and high pressure
2008 - Philipp Mertmann, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann
WELTPP-11 Kerkrade, The Netherlands (2008)A global model of a dual frequency capacitive discharge considering the nonlinearity of the sheath and a bulk-chemestry
2007 - Philipp Mertmann, Ralf Peter Brinkmann, Peter Awakowicz
WeltPP-10. Kerkrade, The Netherlands, 15-16 NovemberA global model of a dual frequency capacitive discharge considering the nonlinearity of the sheath and a bulk-chemestry
2007 - Philipp Mertmann, Ralf Peter Brinkmann, Peter Awakowicz
60th Annual Gaseous Electronics Conference, Arlington (Virginia), USA, 02-05 OctoberUntersuchung verschiedener Näherungen bei Multifluid-Plasmamodellen der kathodennahen Randschicht thermischer Plasmen
2007 - Frank Holger Scharf, Jens Oberrath, Philipp Mertmann, Ralf Peter Brinkmann
DPG Frühjahrstagung, Düsseldorf, Germany, 2007High Frequency behaviour of dual frequency capacitively coupled plasmas
2007 - Egmont Semmler, Peter Awakowicz, Dennis Ziegler, Ralf Peter Brinkmann
28th Int. Conference on Phenomena in Ionized Gases ICPIG, Prague, Czech Republic, 15-20 JuliA nonlinear global model of a capacitive argon discharge
2007 - Philipp Mertmann, Ralf Peter Brinkmann, Peter Awakowicz
Workshop on Radio-Frequency Discharges, Dublin, Ireland, 11-13 JuneNichtlineares globales Modell einer kapazitiven Hochfrequenzentladung in Argon
2007 - Philipp Mertmann, Peter Awakowicz, Ralf Peter Brinkmann
DPG Frühjahrstagung, Düsseldorf, Germany, 19-23 MarchUntersuchung der Neutralteilchengeschwindigkeit in der Randschicht thermischer Plasmen
2007 - Frank Holger Scharf, Jens Oberrath, Philipp Mertmann, Ralf Peter Brinkmann
13. Fachtagung Plasmatechnologie (PT 13), Bochum, Germany, 05-07 MarchFTIR analysis of plasma polymerized SiOx films for diffusion barrier coatings of PET bottles
2007 - Michael Deilmann, Pawöhner, C. , Peter Awakowicz
Proceedings of the XXVIII International Conference on Phenomena in Ionized Gases (ICPIG), 2007. 28 (13) 721–723.Modellbsierte Regelung einer kapazitiv gekoppelten HF-Entladung
2006 - Egmont Semmler, Dennis Ziegler, Peter Awakowicz, Ralf Peter Brinkmann
DPG Frühjahrstagung, Augsburg, Germany, 27-30 MarchSelf-Excited Electron resonance Spectroskopy in Dual Frequency Capacitively Coupled Plasmas
2006 - Egmont Semmler, Peter Awakowicz, Dennis Ziegler, Ralf Peter Brinkmann
DPG Frühjahrstagung, Augsburg, Germany, 27-30 march