Publications

Basic research of electron dynamics in low pressure capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann, Thomas Mussenbrock

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring

2020 - Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Thomas Mussenbrock, Zoltán Donkó, Aranka Derzsi, Peter Hartmann

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Electrostatic wave propagation in the presence of secondary electrons in low pressure capacitively coupled plasmas

2020 - Katharina Nösges, Julian Schulze, Máté Vass, Zoltán Donkó, Peter Hartmann, Thomas Mussenbrock, Ralf Peter Brinkmann, Sebastian Wilczek

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

The difference between electron heating and power absorption in capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann, Thomas Mussenbrock

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles

2020 - Dennis Pohle, Felix Mitschker, Jonathan Jenderny, Marcel Rudolph, Christian Schulz, Peter Awakowicz, Ilona Rolfes

accepted in European Microwave Conference 2020, Utrecht, Netherlands, 2020

A potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal

2019 - Florian Krüger, Sebastian Wilczek, Thomas Mussenbrock, Julian Schulze

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

Spatio-temporal analysis of electron power absorption in low pressure CCPs operated in O2

2019 - Máté Vass, Sebastian Wilczek, Julian Schulze, Trevor Lafleur, Zoltán Donkó, Ralf Peter Brinkmann

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

The Influence of gamma- and delta-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas

2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Thomas Mussenbrock, Ralf Peter Brinkmann, Sebastian Wilczek

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

Near Cathode Modeling of a Hollow Cathode Arc in an Axial Magnetic Field

2019 - Liang Xu, Jens-Pe­ter Heinß, Ilija Ste­fa­no­vic, Denis Eremin, Fred Fietzke, Peter Awakowicz, Ralf Peter Brinkmann

5th WOPMAS, 5th-6th December, 2019, Bochum, Germany

Untersuchung des Einflusses von Fertigungstoleranzen auf das Messverhalten der Multipol-Resonanz-Sonde

2019 - Dennis Pohle, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

Kleinheubacher Tagung 2019, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 23-25, 2019
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