Publications

The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes

2020 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE Transactions on Microwave Theory and Techniques, DOI: 10.1109/TMTT.2020.2974835, April 2020 [IEEE Library]
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