Publications
Plasma and Charged Particle Interaction with the Surfaces of a MEMS-Device, Micro-Mass Spectrometer
2020 - Patrick Hermanns, Stephan Westerdick, Simon Böddeker, Peter Awakowicz
47th IEEE International Conference on Plasma Science, Singapore, December 6-10, 2020.Basic research of electron dynamics in low pressure capacitively coupled plasmas
2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring
2020 - Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Zoltán Donkó, Aranka Derzsi, Peter Hartmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020Electrostatic wave propagation in the presence of secondary electrons in low pressure capacitively coupled plasmas
2020 - Katharina Nösges, Julian Schulze, Máté Vass, Zoltán Donkó, Peter Hartmann, Ralf Peter Brinkmann, Sebastian Wilczek
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020The difference between electron heating and power absorption in capacitively coupled plasmas
2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann
73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles
2020 - Dennis Pohle, Felix Mitschker, Jonathan Jenderny, Marcel Rudolph, Christian Schulz, Peter Awakowicz, Ilona Rolfes
European Microwave Conference 2020, Utrecht, Netherlands, 2020