Publications

Basic research of electron dynamics in low pressure capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

2020 - Peter Hartmann, Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Zoltán Juhász, Zoltán Donkó, Aranka Derzsi, Eunwoo Lee, Julian Schulze

https://doi.org/10.1088/1361-6595/ab9374

Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring

2020 - Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Zoltán Donkó, Aranka Derzsi, Peter Hartmann

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Electron dynamics in low pressure capacitively coupled radio frequency discharges

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó

https://doi.org/10.1063/5.0003114

Electrostatic wave propagation in the presence of secondary electrons in low pressure capacitively coupled plasmas

2020 - Katharina Nösges, Julian Schulze, Máté Vass, Zoltán Donkó, Peter Hartmann, Ralf Peter Brinkmann, Sebastian Wilczek

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure

2020 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

https://doi.org/10.1088/1361-6595/aba111

The difference between electron heating and power absorption in capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles

2020 - Dennis Pohle, Felix Mitschker, Jonathan Jenderny, Marcel Rudolph, Christian Schulz, Peter Awakowicz, Ilona Rolfes

accepted in European Microwave Conference 2020, Utrecht, Netherlands, 2020

The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes

2020 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE Transactions on Microwave Theory and Techniques, DOI: 10.1109/TMTT.2020.2974835, April 2020 [IEEE Library]

Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

2019 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

Plasma Sources Science and Technology

A potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal

2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

Spatio-temporal analysis of electron power absorption in low pressure CCPs operated in O2

2019 - Máté Vass, Sebastian Wilczek, Julian Schulze, Trevor Lafleur, Zoltán Donkó, Ralf Peter Brinkmann

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

The Influence of gamma- and delta-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas

2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches

2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze

Plasma Sources Science and Technology, Volume 28, Number 7

Near Cathode Modeling of a Hollow Cathode Arc in an Axial Magnetic Field

2019 - Liang Xu, Jens-Pe­ter Heinß, Ilija Ste­fa­no­vic, Denis Eremin, Fred Fietzke, Peter Awakowicz, Ralf Peter Brinkmann

5th WOPMAS, 5th-6th December, 2019, Bochum, Germany

Untersuchung des Einflusses von Fertigungstoleranzen auf das Messverhalten der Multipol-Resonanz-Sonde

2019 - Dennis Pohle, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

Kleinheubacher Tagung 2019, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 23-25, 2019

Minimally Invasive Supervision of Plasma-assisted Dielectric Deposition Processes

2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2019), pp. 163-165, DOI: 10.1109/IMWS-AMP.2019.8880124, Bochum, Germany, July 16-18, 2019 [IEEE Library]

Nichtlokale und nichtlineare Elektronendynamik in kapazitiv gekoppelten Hochfrequenzentladungen

2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó

19. Fachtagung für Plasmatechnologie PT19, Cottbus, Deutschland, Juni 17-19, 2019.

Nonlinear Electron Power Absorption in Capacitively Coupled Radio Frequency Discharges

2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Zoltán Donkó

2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.

Power Gain and Loss Dynamics of γ- and δ- electrons in Low Pressure CCRF Discharges

2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek

9th bi-annual Radio Frequency Workshop, Dublin, Ireland, June 24-25 2019

Theoretical investigation of the magnetic asymmetry effect by using a lumped element model

2019 - Dennis Engel, Moritz Oberberg, Birk Berger, Laura Kroll, Julian Schulze, Peter Awakowicz, Ralf Peter Brinkmann

2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.

Kinetic interpretation of a magnetically enhanced hollow cathode arc discharge

2019 - Liang Xu, Jens-Pe­ter Heinß, Ilija Stefanovic, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann

13th Frontiers in Low-Temperature Plasma Diagnostics & 1st Frontiers in Low-Temperature Plasma Simulations, 13th -16th May, 2019, Bad Honnef, Germany

Monitoring of Industrial Plasma Processes Using the Multipole Resonance Probe

2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

European Microwave Conference in Central Europe (EuMCE), pp. pp. 622-625, Prague, Czech Republic, May 13-15, 2019 [IEEE Library]

High Frequency Plasma Enhancement of a Conventional Spark Ignition System to Extend the Operating Range of a Modern Mass-Production Engine

2018 - Kevin Stark, Sven Gröger, Marcel van Delden, Gordon Notzon, Wolfgang Eifler, Thomas Musch, Peter Awakowicz

4th International Conference on Ignition Systems for Gasoline Engines, Berlin, Germany, Dec. 2018.

Nonlocal and nonlinear dynamics in low pressure capacitively coupled radio frequency discharges

2018 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Donkó, Zoltán

71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.

Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation GEC 2018

2018 - Julian Schulze, Zoltán Donkó, Trevor Lafleur, Sebastian Wilczek, Ralf Peter Brinkmann

71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.

The effects of secondary electrons on the discharge characteristics and control of particle properties in low-pressure capacitively coupled plasmas

2018 - Aranka Derzsi, Benedek Horvath, Katharina Nösges, Sebastian Wilczek, Zoltán Donkó, Julian Schulze

71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.

On understanding of a magnetically enhanced hollow cathode arc plasma

2018 - Liang Xu, Jens-Peter Heinß, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann

71st Annual Gaseous Electronics Conference, Portland, USA, November 5-9, 2018.

A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Michael Friedrichs, Alexandra Serwa, Peter Uhlig, Jens Oberrath, Peter Awakowicz, Ilona Rolfes

30th Asia-Pacific Microwave Conference (APMC), pp. 1315-1317, DOI: 10.23919/APMC.2018.8617552, Kyoto, Japan, November 06–09, 2018 [IEEE Library]

Eine temperaturbeständige Sonde für die Plasmadiagnostik in LTCC

2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz

IMAPS-Herbstkonferenz 2018, München, Deutschland, October 18–19, 2018

Disparity between current and voltage driven capacitively coupled radio frequency discharges

2018 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Donkó, Zoltán, Ralf Peter Brinkmann

Plasma Sources Science and Technology, Accepted Manuscript online 2 October 2018 https://doi.org/10.1088/1361-6595/aae5c1

Multi frequency matching for voltage waveform tailoring

2018 - Frederik Schmidt, Julian Schulze, Erik Johnson, Jean-Paul Booth, Douglas Keil, David M French, Jan Trieschmann

Plas­ma Sour­ces Sci­ence and Tech­no­lo­gy, Vo­lu­me 27, Num­ber 9 http://iopscience.iop.org/article/10.1088/1361-6595/aad2cd

Progression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology

2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes

48th European Microwave Conference (EuMC), pp.239-242, DOI: 10.23919/EuMC.2018.8541730, Madrid, Spain, Sep 23-27, 2018 [IEEE Library]

Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation

2018 - Julian Schulze, Zoltán Donkó, Trevor Lafleur, Sebastian Wilczek, Ralf Peter Brinkmann

Plasma Sources Science and Technology, Volume 27, Number 5 http://iopscience.iop.org/article/10.1088/1361-6595/aabebc/meta

A Temperature Stable Probe for Plasma Diagnostics in LTCC

2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz

IMAPS/ACerS 14th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2018), Aveiro, Portugal, April 18–20, 2018

An Advanced High-temperature Stable Multipole Resonance Probe for Industry Compatible Plasma Diagnostics

2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes

German Microwave Conference (GeMiC 2018), pp. 235-238, doi: 10.23919/GEMIC.2018.8335073, Freiburg, Germany, March 12–14, 2018 [IEEE Library]

The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes

2018 - Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz

DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018

Neural network based linearization and control of sputter processes

2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze

Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017

Control-oriented modeling and stabilization of reactive sputter processes

2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze

16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017

The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas

2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltan Donko

70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017

A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen

2017 - Efe Kemaneci, Ralf Peter Brinkmann, Felix Mitschker, Peter Awakowicz

70th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Pitts­burgh (Penn­syl­va­nia), USA, No­vem­ber 8, 2017

Comparison of Zero Dimensional Plasma Chemistry Model with Ozone Absorption Spectroscopy Measurements

2017 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Friederike Kogelheide, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Katharina Stapelmann

70th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Pitts­burgh (Penn­syl­va­nia), USA, No­vem­ber 8, 2017

Differences Between Cartesian and Spherical 1d3v Particle-in-Cell Simulations

2017 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltan Donko

70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 7, 2017

Sputtering process data interpreted by heavy particle simulations

2017 - Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

The application of the multipole resonance probe to industrially relevant processes

2017 - Moritz Oberberg, Marcel Fiebrandt, Stefan Ries, Christian Wölfel, Peter Awakowicz

70th Annual Gaseous Electronics Conference, Pittsburgh, USA, 2017

The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges

2017 - Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Peter Awakowicz, Zoltan Donko, Julian Schulze

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

Model identification of nonlinear sputter processes

2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze

C. Wölfel, S. Kockmann, P. Awakowicz, J. Lunze: Model identification of nonlinear sputter processes Proc. of the 17th International Conference on Control, Automation and Systems, pp. 182-187, Jeju, Korea, 2017.

Realisierung einer temperaturstabilen Multipol -Resonanz -Sonde in LTCC -Technologie für die Plasmadiagnostik

2017 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Uhlig, Alexandra Serwa, Peter Awakowicz, Ilona Rolfes

Klein­heu­ba­cher Ta­gung 2017, U.R.S.I. Lan­des­aus­schuss in der Bun­des­re­pu­blik Deutsch­land e.V., Mil­ten­berg, Ger­ma­ny, Sep 25-27, 2017

Ein Ansatz zur Modellierung und Regelung reaktiver Zerstäubungsprozesse

2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze

GMA-FA 1.30 Modellbildung, Identifikation und Simulation in der Automatisierungstechnik, Anif, 2017

Robust high-gain control of nonlinear reactive sputter processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 1st IEEE Conference on Control Technology and Applications, pp. 25-30, Hawai'i, USA, 2017
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