Publications

Basic research of electron dynamics in low pressure capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann, Thomas Mussenbrock

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

2020 - Peter Hartmann, Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Thomas Mussenbrock, Zoltán Juhász, Zoltán Donkó, Aranka Derzsi, Eunwoo Lee, Julian Schulze

https://doi.org/10.1088/1361-6595/ab9374

Control of electron velocity distributions at the wafer in low pressure high voltage capacitively coupled discharges by Voltage Waveform Tailoring

2020 - Li Wang, Katharina Nösges, Birk Berger, Sebastian Wilczek, Ralf Peter Brinkmann, Julian Schulze, Zoltán Juhász, Eunwoo Lee, Thomas Mussenbrock, Zoltán Donkó, Aranka Derzsi, Peter Hartmann

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Electron dynamics in low pressure capacitively coupled radio frequency discharges

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Thomas Mussenbrock

https://doi.org/10.1063/5.0003114

Electrostatic wave propagation in the presence of secondary electrons in low pressure capacitively coupled plasmas

2020 - Katharina Nösges, Julian Schulze, Máté Vass, Zoltán Donkó, Peter Hartmann, Thomas Mussenbrock, Ralf Peter Brinkmann, Sebastian Wilczek

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure

2020 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

https://doi.org/10.1088/1361-6595/aba111

The difference between electron heating and power absorption in capacitively coupled plasmas

2020 - Sebastian Wilczek, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Jan Trieschmann, Thomas Mussenbrock

73rd Annual Gaseous Electronics Conference, San Diego, October 5–9, 2020

A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles

2020 - Dennis Pohle, Felix Mitschker, Jonathan Jenderny, Marcel Rudolph, Christian Schulz, Peter Awakowicz, Ilona Rolfes

accepted in European Microwave Conference 2020, Utrecht, Netherlands, 2020

The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes

2020 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE Transactions on Microwave Theory and Techniques, DOI: 10.1109/TMTT.2020.2974835, April 2020 [IEEE Library]

Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

2019 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

Plasma Sources Science and Technology

A potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal

2019 - Florian Krüger, Sebastian Wilczek, Thomas Mussenbrock, Julian Schulze

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

Spatio-temporal analysis of electron power absorption in low pressure CCPs operated in O2

2019 - Máté Vass, Sebastian Wilczek, Julian Schulze, Trevor Lafleur, Zoltán Donkó, Ralf Peter Brinkmann

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

The Influence of gamma- and delta-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas

2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Thomas Mussenbrock, Ralf Peter Brinkmann, Sebastian Wilczek

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches

2019 - Florian Krüger, Sebastian Wilczek, Thomas Mussenbrock, Julian Schulze

Plasma Sources Science and Technology, Volume 28, Number 7

Near Cathode Modeling of a Hollow Cathode Arc in an Axial Magnetic Field

2019 - Liang Xu, Jens-Pe­ter Heinß, Ilija Ste­fa­no­vic, Denis Eremin, Fred Fietzke, Peter Awakowicz, Ralf Peter Brinkmann

5th WOPMAS, 5th-6th December, 2019, Bochum, Germany

Untersuchung des Einflusses von Fertigungstoleranzen auf das Messverhalten der Multipol-Resonanz-Sonde

2019 - Dennis Pohle, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

Kleinheubacher Tagung 2019, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 23-25, 2019

Minimally Invasive Supervision of Plasma-assisted Dielectric Deposition Processes

2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2019), pp. 163-165, DOI: 10.1109/IMWS-AMP.2019.8880124, Bochum, Germany, July 16-18, 2019 [IEEE Library]

Nichtlokale und nichtlineare Elektronendynamik in kapazitiv gekoppelten Hochfrequenzentladungen

2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó, Thomas Mussenbrock

19. Fachtagung für Plasmatechnologie PT19, Cottbus, Deutschland, Juni 17-19, 2019.

Nonlinear Electron Power Absorption in Capacitively Coupled Radio Frequency Discharges

2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Zoltán Donkó, Thomas Mussenbrock

2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.

Power Gain and Loss Dynamics of γ- and δ- electrons in Low Pressure CCRF Discharges

2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Thomas Mussenbrock, Sebastian Wilczek

9th bi-annual Radio Frequency Workshop, Dublin, Ireland, June 24-25 2019
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