Publications

A potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal

2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

Spatio-temporal analysis of electron power absorption in low pressure CCPs operated in O2

2019 - Máté Vass, Sebastian Wilczek, Julian Schulze, Trevor Lafleur, Zoltán Donkó, Ralf Peter Brinkmann

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

The Influence of gamma- and delta-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas

2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek

72nd Annual Gaseous Electronics Conference, October 28–November 1 2019; College Station, Texas

Near Cathode Modeling of a Hollow Cathode Arc in an Axial Magnetic Field

2019 - Liang Xu, Jens-Pe­ter Heinß, Ilija Ste­fa­no­vic, Denis Eremin, Fred Fietzke, Peter Awakowicz, Ralf Peter Brinkmann

5th WOPMAS, 5th-6th December, 2019, Bochum, Germany

Untersuchung des Einflusses von Fertigungstoleranzen auf das Messverhalten der Multipol-Resonanz-Sonde

2019 - Dennis Pohle, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

Kleinheubacher Tagung 2019, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 23-25, 2019

Minimally Invasive Supervision of Plasma-assisted Dielectric Deposition Processes

2019 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2019), pp. 163-165, DOI: 10.1109/IMWS-AMP.2019.8880124, Bochum, Germany, July 16-18, 2019 [IEEE Library]

Nichtlokale und nichtlineare Elektronendynamik in kapazitiv gekoppelten Hochfrequenzentladungen

2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó

19. Fachtagung für Plasmatechnologie PT19, Cottbus, Deutschland, Juni 17-19, 2019.

Nonlinear Electron Power Absorption in Capacitively Coupled Radio Frequency Discharges

2019 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Zoltán Donkó

2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.

Power Gain and Loss Dynamics of γ- and δ- electrons in Low Pressure CCRF Discharges

2019 - Katharina Nösges, Aranka Derzsi, Benedekt Horvath, Julian Schulze, Ralf Peter Brinkmann, Sebastian Wilczek

9th bi-annual Radio Frequency Workshop, Dublin, Ireland, June 24-25 2019

Theoretical investigation of the magnetic asymmetry effect by using a lumped element model

2019 - Dennis Engel, Moritz Oberberg, Birk Berger, Laura Kroll, Julian Schulze, Peter Awakowicz, Ralf Peter Brinkmann

2019 IEEE Pulsed Power and Plasma Science Conference (PPPS 2019), Orlando, USA, June 21-28, 2019.
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