Publications

The Multipole Resonance Probe: Investigation of an Active Plasma Resonance Probe Using 3D-electromagnetic Field Simulations

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

42nd European Microwave Week, pp. 566-569 Amsterdam, The Netherlands, Oct 28 – Nov 2, 2012 [IEEE-Library]

A Novel Radio-Frequency Plasma Probe for Monitoring Systems in Dielectric Deposition Processes

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

International Conference on Electromagnetics in Advanced Applications (ICEAA '12), pp. 728-731, DOI: 10.1109/ICEAA.2012.6328725, Cape Town, South Africa, Sep 2-7, 2012 [IEEE-Library]

Film deposition on the inner surface of tubes using atmospheric-pressure Ar-CH4, Ar-C2H2 and Ar-C2H2-H-2 plasmas: interpretation of film properties from plasma-chemical kinetics

2012 - Ramasamy Pothiraja, Max Engelhardt, Nikita Bibinov, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 45, Issue: 33, Article Number: 335202, DOI: 10.1088/0022-3727/45/33/335202, Published: AUG 22 2012

Quantitative characterization of a dielectric barrier discharge in air applying non-calibrated spectrometer, current measurement and numerical simulation

2012 - Priyadarshini Rajasekaran, Nikita Bibinov, Peter Awakowicz

MEASUREMENT SCIENCE & TECHNOLOGY, Volume: 23, Issue: 8, Article Number: 085605, DOI: 10.1088/0957-0233/23/8/085605, Published: AUG 2012

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

2012 - Ralf Peter Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz

PCT/DE2011/001802, R. P. Brinkmann, J. Oberrath, P. Awakowicz, M. Lapke, T. Musch, T. Mussenbrock, I. Rolfes, C. Schulz, R. Storch, T. Styrnoll, C. Zietz (Erfinder), Ruhr-Universität Bochum (Anmelder), Offenlegung 12.04.2012

Dual frequency capacitive plasmas in Fe and Ni sputter applications: correlation of discharge properties on thin film properties

2012 - Stefan Bienholz, Egmont Semmler, Peter Awakowicz, H Brunken, A Ludwig

PLASMA SOURCES SCIENCE & TECHNOLOGY, Volume: 21, Issue: 1, Article Number: 015010, DOI: 10.1088/0963-0252/21/1/015010, Published: FEB 2012
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