Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

2019 - Máté Vass, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze

Plasma Sources Science and Technology

Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches

2019 - Florian Krüger, Sebastian Wilczek, Julian Schulze

Plasma Sources Science and Technology, Volume 28, Number 7